Used Cluster Tool Buying Guide: Centura vs Sequel
Comparing used Centura and Sequel offers? Check chamber identity, configuration records, acceptance tests and quote exclusions before you buy.
Buying a used cluster tool? Compare the documented configuration of each offered machine before comparing its price. Use this guide to turn a Centura or Sequel listing into a purchase specification that your process engineer can review.
Centura vs Sequel: build a configuration comparison
Ask each seller to complete the same worksheet. Leave an unanswered field open rather than filling it from another listing.
| Decision | Evidence to request for each offer | Purchase condition to agree |
|---|---|---|
| Tool identity | Manufacturer plate, exact model, serial number and configuration record | Quote names the inspected machine |
| Process chambers | Chamber labels, revisions, installed options and service records | Included chamber list attached to order |
| Wafer handling | Documented wafer format, robot/controller identifiers and handling demonstration | Buyer-approved transfer sequence |
| Utilities | Installation drawing and requirements for the offered configuration | Facilities review before shipment |
| Software | Version, enabled options, backup scope and license documentation | Written confirmation of required rights |
Do not approve a substitution based on the platform name alone. Ask your engineer to check the offered assembly against the intended recipe, wafer format and tool records.
Acceptance criteria to agree before a deposit
Set the test method, limits, witness and remedy in writing. Have your process team define the numerical limits; do not take generic values from an unrelated machine.
- Request a documented pumpdown and leak-test procedure for the offered configuration, with dated results and instrument identification.
- Agree on a wafer-transfer demonstration covering the stations you intend to use. Request the alarm log and a record of unsuccessful transfers as well as successful ones.
- Specify a process demonstration on your agreed test material. Define the measurements and sampling plan before the demonstration.
- Identify which tests happen before deinstallation and which must be repeated after installation. Assign responsibility for discrepancies.
Compare complete quotes, not bare-machine prices
Request separate line items for the tool, included pumps and peripherals, refurbishment scope, decontamination documentation, rigging, packing, freight, installation and qualification. Ask for exclusions and quote validity. Obtain a written shipment estimate for the specific offer instead of assuming a standard lead time.
For an upgrade proposal, request the engineering scope and a documented compatibility review before including it in the purchase plan.
Questions buyers should resolve
Can chambers be mixed or upgraded? Ask for an OEM-supported configuration document or an engineering approval identifying the exact assemblies. Leave the change unapproved until that evidence is available.
What if maintenance records are missing? Request an inspection and qualification plan, identify unresolved items, and agree on the commercial remedy before ordering.
What should go in an RFQ? Include the intended process, wafer format, required chamber configuration, destination utilities, acceptance plan and requested delivery date.