Build your compound
semiconductor fab line.
You're standing up a SiC or GaN fab and the 150mm tool market is thinning out fast. Caladan helps compound semiconductor startups source full equipment sets — with compatibility guidance for silicon tools running SiC processes — without burning through your Series B.
What SiC startups are up against — and how we help
150mm tools are disappearing from the market
As silicon fabs migrate to 300mm, quality 150mm tools are being decommissioned at scale — but they don't always stay available long. Caladan actively tracks this inventory and can move quickly when the right tool surfaces.
You need 10–30 tools, not just one
Standing up a fab line requires a coordinated equipment set. We can source across etch, implant, epi, inspection, and metrology — working from your tool list to fill gaps systematically rather than tool by tool.
Uncertain whether silicon tools will run SiC processes
Not every silicon tool can handle SiC process conditions. Our team has experience assessing chamber materials, temperature limits, and gas compatibility for SiC applications — we flag known issues before you commit.
VC budget constraints require capital discipline
Used equipment can be 40–70% below new-tool pricing. We work with startups to prioritize which tools need the latest generation versus where a well-maintained used system delivers the same process result.
SiC-compatible tools available now
Axcelis Purion H
Axcelis · High Energy Ion Implant
High-energy ion implanter well-suited for SiC doping applications. Supports the implant energies required for well and source/drain formation in SiC devices.
AMAT Centura Epi
Applied Materials · Epitaxial Deposition
Single-wafer CVD epitaxy system. Configurable for SiC homoepitaxy on 150mm substrates. Compatible with high-temperature process requirements.
KLA 2351
KLA-Tencor · 150mm Inspection
Wafer inspection platform for 150mm process control. Effective for post-implant and post-epi defect inspection on SiC substrates.
Lam 2300 Kiyo
Lam Research · Conductor Etch
Conductor etch system for metal and poly gate etching. Configurable for the hard materials common in SiC device fabrication.