Semiconductor Equipment Decommissioning: Handoff Checklist
Plan semiconductor equipment decommissioning with documented isolation, contamination review, asset records and a signed release before removal.
Build a semiconductor equipment decommissioning plan around a documented release decision. Before scheduling removal, identify who owns process shutdown, energy isolation, contamination assessment, asset records and handoff to the rigging team.
Record the asset before disconnecting it
Create a register with the tool model, serial number, installed modules, ownership records and proposed destination. Request service history, open fault reports, configuration records and photographs. Record included accessories and proposed spare parts separately.
Where the site authorizes an operational demonstration, agree on the test scope and retain the results before shutdown. Have your IT and equipment teams document the treatment of recipe files, software access, licenses and any data that must be retained or removed. Do not assume software transfer rights from possession of the computer.
Use the equipment inspection checklist to organize the asset condition record.
Assign shutdown and contamination review
Have the site's authorized equipment and EHS personnel produce the shutdown and isolation plan using the applicable procedures. Ask them to identify energy sources, process materials, service history and any contamination information needed for release.
Require the responsible specialists to define decontamination, sampling, waste handling and release criteria for the actual tool and its process history. Do not use a generic purge count, solvent recipe or contamination threshold from a buying guide. Keep the approved procedure and release evidence with the equipment record.
For related planning questions, see the safe equipment decommissioning guide.
Use a written release-to-rigging checklist
Before collection, request a signed handoff recording:
- Tool identity and the exact modules cleared for removal.
- Completion of the authorized shutdown/isolation procedure and the responsible signatory.
- Contamination assessment, release status and any remaining restrictions.
- Disconnected utilities, labeled connections and transport preparation, as specified by the approved plan.
- Packing inventory, photographs and custody-transfer responsibilities.
Make unresolved items visible in the handoff. Do not authorize collection until the responsible site personnel have approved the equipment release and the rigging team has accepted the documented restrictions.
Coordinate handling and receiving-site responsibilities with the moving and rigging guide.
Compare removal and asset-recovery offers
Request separate quotes for shutdown support, decontamination, waste handling, disconnection, packing, rigging, transport and site restoration. Require bidders to identify assumptions, exclusions and the evidence needed to firm up their offers.
For resale, ask for offers tied to the documented configuration and condition. Compare expected proceeds with the quoted removal and recovery scope; do not assign a resale percentage from wafer size or original purchase price alone.
Can I advertise a tool before decommissioning is complete? Ask your team to distinguish the proposed sale scope from the approved removal status. Disclose unresolved release conditions in the offer and do not promise a collection date before site approval.
What should the buyer receive? Request an agreed handover packet: configuration and condition records, included-item inventory, relevant release documentation, handling restrictions and the parties responsible for installation and acceptance.