Used Axcelis Purion Ion Implanter: Buyer Checklist
Buying a used Axcelis Purion? Check the exact configuration, recipe acceptance tests, service scope and removal terms before requesting a quote.
Start a used Axcelis Purion purchase with a recipe requirements sheet and the seller's serial-numbered equipment list. Ask the seller to demonstrate the offered system against your process requirements before agreeing to a purchase price.
Match the offered Purion to your process
Record the exact model designation, serial number, installed options, software version and included support equipment. Have your implant engineer specify the required species, dose and energy windows, wafer format and handling requirements. Ask the seller to respond to each requirement with documentation for the actual tool.
Do not approve an H, M or XE substitution from the model name alone. Request the configuration records and a written review from your process engineer or service provider.
For a broader sourcing checklist, see the used ion implanter buying guide.
Agree on acceptance before the inspection
Use a written test plan with buyer-defined limits, witnesses and a record of the test conditions. Have qualified implant personnel conduct the demonstration under the site's approved procedures.
- Specify the recipes and monitor wafers to be used, including which steps must be witnessed.
- Request beam-current traces, dose measurement results and uniformity data for those recipes.
- Ask for the source service history, vacuum records, alarm history and unresolved maintenance items.
- Record pass/fail results against the tool serial number. List any test that could not be completed as an open acceptance item.
Do not substitute a generic current, duration or percentage threshold for an agreed process qualification. Use the factory acceptance test guide to organize responsibilities and sign-off.
Define what the quote includes
Request separate line items for the tool, refurbishment, missing equipment, removal, freight, installation and acceptance support. Ask who will perform each service and obtain their written scope. Confirm service eligibility for the exact serial number directly with the proposed provider; do not assume a seller's description transfers a service agreement.
For an incomplete system, ask for a missing-items schedule and integration proposal before comparing it with a tested complete tool. Put software access, documentation, spare parts and any exclusions in the quote.
What to send with an RFQ
Send your recipe requirements, target site, preferred inspection location and desired acceptance milestone. Request the equipment list, nameplate photographs, maintenance records and proposed test plan in return. Keep a requested delivery date separate from a supplier-confirmed commitment.
How much should I budget? Build the budget from the itemized offers and service scopes above; request a quote for each unresolved cost before approving the purchase.
Should I accept a tool without a live demonstration? Treat that as a separate as-is decision. Document the untested functions, proposed recovery work and the commercial terms your team is willing to accept.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.