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Buying Guides2 min readBy Caladan Semi
Used KLA 2132/2139: Optical Inspection Buyer Guide
Evaluate used KLA 2132/2139 offers with a configuration checklist, representative-wafer acceptance plan, service records and itemized installation scope.
Qualify a used KLA 2132 or 2139 against your inspection task before comparing quotations. Request the exact tool configuration and a demonstration plan using your representative wafers; do not treat a model number as a performance guarantee.
Match the inspection task and offered configuration
- Document your wafer format, layer types, defects of interest, reporting requirements and target throughput. Ask the seller to map each requirement to the offered system.
- Request the nameplate, serial number, configuration report, installed options and software/license records. Resolve discrepancies with manufacturer documentation.
- Ask for written evidence of wafer-handling support and any modifications. Do not assume a size conversion or model upgrade is included.
Build a representative-wafer acceptance plan
- Have your process team select reference wafers and define the defects and locations to evaluate. Agree the recipes and reference measurement method before testing.
- Set buyer-approved criteria for detection, nuisance results, repeatability, review workflow and throughput. Request the underlying maps and run data, not only selected screenshots.
- Repeat the agreed evaluation as specified in the contract and document any recipe changes or exclusions. Identify who approves factory and site acceptance.
Review service and installation scope
- Request maintenance and fault history, calibration records and details of replaced or modified assemblies. Ask for unresolved issues to be listed in the quotation.
- Obtain written confirmation of service coverage, required spares and software transfer rights. Require a separate scope and evidence for any proposed retrofit.
- Assign responsibility for deinstallation, transport, utilities, installation and post-move calibration. Include remedies for failed site acceptance.
Compare complete purchase proposals
- Ask for itemized quotes covering the tool, options, refurbishment, acceptance work and services. Evaluate offers against the same scope.
- Hold the purchase if configuration records or demonstration evidence do not meet your agreed requirements. Set the conditions for release in writing.
Related buying resources
Use these for additional purchasing questions, not as proof of compatibility or approval of a substitute.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.