Used KLA Surfscan SP3, SP5 and SP7: Buying Checks
OEM-sourced Surfscan generation differences, acceptance checks and quote scope. Unsupported price, service-cost and laser-life claims withdrawn.
Correction — September 30, 2026: The earlier Surfscan price ranges, service and laser-cost estimates, transaction anecdote and technical cutoffs were insufficiently supported. That was our mistake. We apologize and have removed them. We are not replacing them with unverified asking prices or a new market-value range.
This guide is for: An engineer or buyer comparing used Surfscan configurations. Start with the inspection result required, then ask whether the identified machine can demonstrate it.
SP3, SP5 and SP7: what the OEM announcements say
SP3: KLA introduced this DUV unpatterned wafer inspection platform in July 2011 for the 28nm device node and below. Its announcement describes DUV optics, a new stage and image computer, and integrated SURFmonitor surface-quality mapping. Our previous 60nm sensitivity ceiling and claim that SP3 cannot support 45nm applications were incorrect.
SP5: KLA's July 2014 announcement describes enhanced DUV optical technology, sub-20nm defect sensitivity and throughput up to three times the previous SP3 platform. Those are OEM platform statements, not the measured performance of an offered used unit.
SP7: KLA's July 2018 announcement describes inspection of bare wafers and smooth/rough films for 7nm logic and advanced memory applications, with changes to illumination and sensor architecture and real-time defect classification. It does not justify our earlier blanket claim that only SP7 can serve all applications at 28nm and below.
Read the SP3, SP5 and SP7 announcements in context. Device design node is not a particle-size sensitivity limit. Do not choose a tool from a node-to-model rule alone.
Demonstrate the required result on the offered system
Request the exact model, nameplate/serial, installed wafer handler, software version, enabled options and complete packing list. Define wafer material, diameter, surface, defect types, reference standards, scan recipe, sensitivity, repeatability and throughput with your metrology team.
Require dated, serial-linked results under those conditions. Distinguish a historical pre-deinstallation test from a current powered demonstration and from the test that will be required after installation. Agree acceptance criteria and remedies before committing to purchase.
Laser and service costs require a unit-specific quote
We have removed the generic laser wavelength/lifetime, remaining-life percentages, replacement-cost estimates and service-price tables. Obtain identification and maintenance records for the installed laser, then have a qualified provider assess its condition and quote any needed work. Runtime alone should not be converted into a promised remaining lifetime.
Ask prospective service providers to confirm which work they can perform, parts access, software rights, calibration scope and support eligibility for that serial and destination. We cannot support the earlier blanket assertions about which work is exclusively OEM-only or the claimed cost penalties without a service agreement.
Compare defined offers, not unsupported market ranges
No verified replacement market-value range is established here. Separate the quoted equipment price from repairs, packing and rigging, freight and insurance, applicable taxes/duties, software licensing, installation, calibration, acceptance and warranty.
Check asset identity before counting several advertisements as independent comparables. A public asking price is not evidence of a realized sale, and “refurbished” is not a substitute for a written work scope.
Frequently Asked Questions
Q: How much does a used Surfscan or its service agreement cost? A: The earlier ranges have been withdrawn. Request current written quotes for the identified unit, location and scope. We do not have sufficient verified evidence to publish a replacement range.
Q: How long does a Surfscan laser last? A: We are not publishing a universal lifetime. Request the installed component's service history and applicable OEM or qualified-service guidance.
Q: Does a 28nm application automatically require SP7? A: No. KLA introduced SP3 for the 28nm device node and below. The actual wafer, defect and throughput requirements must be demonstrated on the offered configuration.
Q: Can I use an independent service provider? A: Obtain written confirmation of that provider's capabilities, parts access and software rights for the specific unit. Do not infer service eligibility from a generic listing.
Read the corrected SP3 buying guide or contact Caladan with the required configuration and acceptance criteria.
OEM sources checked September 30, 2026. This article does not establish current availability or guarantee used-tool performance.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.