Used MOCVD for GaN-on-SiC: Veeco & Aixtron Buyer Checks
Buying used GaN-on-SiC MOCVD? Compare Veeco and Aixtron offers by reactor configuration, process evidence, included hardware and acceptance terms.
Buying a used MOCVD system for GaN-on-SiC starts with a configuration review, not a brand ranking. Use this checklist to compare Veeco and Aixtron offers against your substrate, epitaxial stack and acceptance plan.
Match the reactor to your GaN-on-SiC process
Veeco describes its Propel MOCVD platform as supporting silicon, sapphire and silicon carbide substrates for GaN applications. Treat that as platform information, not acceptance evidence for a particular used reactor.
For each candidate, request:
- Tool identity: nameplate, serial number, exact reactor model, build configuration and modification history.
- Substrate setup: your intended SiC diameter, thickness and loading arrangement; request the installed carrier or susceptor drawing.
- Process history: prior substrate materials, chemistries, maintenance records and representative run data.
- Included hardware: an itemized list of reactor components, gas delivery equipment, pumps, abatement, controls and spares. Mark exclusions explicitly.
Do not approve a K465i, G5+ or other candidate solely because the seller calls it “GaN-ready.” Ask for evidence tied to the offered serial number and your intended process.
Compare Veeco and Aixtron offers on the same basis
Use one RFQ worksheet for both sellers. Ask each to document substrate configuration, chamber condition, software access, service support, scope of refurbishment and the proposed acceptance demonstration. Leave unsupported entries unresolved; do not score them as confirmed capability.
For additional shortlist questions, see the used epitaxy equipment buying guide and Veeco MOCVD buyer guide.
Write acceptance criteria before paying a deposit
Have your process engineer define a demonstration on agreed SiC substrates and a representative epitaxial stack. Specify the measurement methods, sampling locations and pass/fail limits for film thickness, uniformity, composition and any electrical or defect metrics your application requires.
Request raw run logs and metrology results, not only a summary marked “passed.” Agree who witnesses testing, who owns test materials, what happens after a failed run and whether acceptance must be repeated after installation.
Use the semiconductor equipment inspection checklist to organize the physical inspection separately from process qualification.
Compare the installed scope, not just the tool quote
Request separate written amounts for the tool, refurbishment, decontamination, packing, freight, installation, facilities work and acceptance testing. Ask who is responsible for each item and which costs are excluded. Obtain a dated availability statement and a milestone-based delivery proposal.
Prepare a sourcing request
Provide your target substrate, intended stack, throughput requirement, site utilities and acceptance criteria. Include any proposed tool's configuration sheet. Request a quote conditional on the documented configuration and agreed test results.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.