Used Rapid Thermal Processing (RTP): Buying Guide 2026
Buying used RTP equipment? Define process requirements, compare documented configurations and agree on acceptance tests before approving a purchase.
Buying used rapid thermal processing equipment? Start with a written process requirement and an acceptance plan. Use this checklist to evaluate an offered tool, request comparable quotations and decide what evidence must be delivered before acceptance.
Define the process before shortlisting an RTP tool
Ask your process owner to document:
- Required substrate material, wafer diameter, thickness and handling method.
- Target temperature profile, ramp and cooling requirements, dwell time and acceptable variation.
- Intended process gases and the facility's approved gas-handling requirements.
- Throughput target, recipe-control needs and required data records.
- Contamination restrictions, prior-process exclusions and qualification method.
Use these requirements to screen offers. Ask for OEM documentation and a configuration-specific review rather than assuming that a model name proves suitability.
Compare offered configurations, not just model families
When considering a Mattson, Applied Materials or AG Associates offer, request the exact model, serial number, build configuration and modification history. Ask the supplier to identify the documentation revision used to describe the tool.
Build a comparison sheet with a separate evidence column:
| Decision | Evidence to request |
|---|---|
| Process fit | OEM operating envelope and review against your intended recipe |
| Temperature control | Installed sensor/control configuration and calibration records |
| Heating hardware | Component identifiers, service history and replacement scope |
| Chamber condition | Inspection photographs and cleaning/contamination history |
| Automation | Demonstration of the proposed loading sequence and interfaces |
| Facilities fit | Configuration-specific utility and installation drawings |
| Support | Written service scope, software access and parts-support proposal |
Mark unanswered items as open. Do not score an undocumented capability as equivalent to a demonstrated one.
Agree on factory acceptance before purchase
Have your process engineer write the test plan for the exact configuration being offered. Specify the test substrates, recipe, measurement method, calibration requirements and numerical pass limits from approved process and OEM documents.
Request temperature-profile records, uniformity measurements, repeat-run results and any applicable process-result measurements. Record the tool serial number and configuration alongside every result. Define how substitutions, failed runs and unresolved alarms will be handled.
Ask for a supervised demonstration of the agreed loading sequence, controls and safety functions by qualified personnel using the appropriate service procedures. Do not authorize bypassing an interlock to complete a demonstration.
Set the commercial acceptance terms in advance: who witnesses testing, who pays for retesting, which records accompany the tool, and what happens if the agreed criteria are not met.
Separate the tool quote from installation and qualification
Request an itemized quotation covering:
- Tool and explicitly included accessories.
- Repairs, refurbishment and replacement parts agreed before shipment.
- Deinstallation, packing, rigging, freight and insurance.
- Site preparation, utility connections and installation.
- Calibration, process qualification, training and support.
Ask the supplier to distinguish completed work from optional work. Require a named owner and written scope for each service. Set delivery milestones against documented readiness and site preparation rather than an assumed standard lead time.
Receiving and site acceptance
Before accepting shipment, request the final serial-linked inventory, packing list, photographs and test dossier. Compare the delivered hardware with the approved configuration and record missing items or transit damage.
Have the installation team complete the agreed site checks before process qualification. Keep shipment acceptance and process acceptance as separate written milestones, with responsibilities and remedies defined in the purchase agreement.
Buyer questions
How much should I budget for a used RTP system?
Request a current tool-specific quote plus the installation and qualification line items above. Set the budget from that documented scope; do not substitute an unsourced model-wide price range.
Which model should I choose?
Choose against your process requirement and acceptance evidence. Require written confirmation of the exact configuration's suitability before approving a model or revision substitution.
What if the seller cannot demonstrate the process?
Ask your technical and procurement teams to define the additional inspection, test work and contractual conditions required. Leave process acceptance unresolved until the agreed evidence is available.
Related buying resources
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.