Used Spectroscopic Ellipsometer: Buyer Checklist
Buying a used spectroscopic ellipsometer? Match spectral coverage, sample handling and software, then request a witnessed test on your film stack.
Choose a used spectroscopic ellipsometer by the films you need to measure and the evidence the seller can provide. Send representative samples and an acceptance plan before comparing offers by model name or asking price.
Match the optical configuration to your samples
J.A. Woollam describes the M-2000 as a spectroscopic ellipsometer for thin-film characterization, using rotating-compensator ellipsometry and high-speed CCD detection.
Treat that family description as a starting point, not a specification for a particular used unit. Request the complete model designation, serial number, installed optical configuration and original option list. Ask for documented spectral coverage and angle settings, then have your metrology engineer compare them with the intended film stack.
Also specify sample dimensions, substrate type, backside treatment, required mapping locations and any temperature-control needs. Ask the seller to identify the actual stage, chuck and accessories included in the offer.
See the ellipsometer and optical metrology guide for related purchasing questions.
Require a sample-based acceptance test
Have your metrology engineer choose reference samples and production-representative films. Define the measurement positions, repeated runs, fitting model and acceptable differences before the demonstration. Request the raw optical measurements as well as the fitted thickness and optical-property results.
Ask the seller to retain the acquisition settings, model files, fit residuals and reference-sample records. Include a reload-and-repeat check if sample positioning matters to your application. Record any excluded wavelengths or failed measurements instead of accepting only a summary screenshot.
Check software and service access
List the computer, operating system, acquisition software, analysis software, licenses, keys and model libraries in the purchase scope. Ask the software provider to confirm transfer terms and support for the proposed computer setup in writing.
Request maintenance and calibration records, including light-source and detector work. Obtain a service assessment for unresolved issues; do not reject or approve a component solely from an unsourced age cutoff. Use the equipment inspection checklist to track missing records.
Ask for an itemized quote
Separate instrument price, accessories, software transfer, service, transport, installation and acceptance support. Ask who will repeat the agreed measurements after delivery and how a failed acceptance will be handled.
What belongs in an RFQ? Send the film stack, sample format, measurement objective, required mapping and available reference samples. Request the configuration list and proposed demonstration in return.
Is an M-2000 or VASE the better purchase? Compare the offered configurations on the same samples and written acceptance criteria. Require documented software and service arrangements before selecting either offer.