Used SVG 8900 Coat/Develop Track: Buyer Checklist
Buying a used SVG 8900 coat/develop track? Match the module list, wafer handling and chemistry, then agree on coat, bake and develop acceptance tests.
Evaluate a used SVG 8900 coat/develop track against a written process requirement, not a comparison price alone. Request the exact model and serial number, module inventory and a process demonstration for the offered configuration.
Match the module list to your process
Give the seller your wafer format, resist and developer requirements, film target, bake sequence and handling needs. Ask for the installed coat, develop, bake, chill and handling modules to be listed, with photographs and documentation. Mark missing or nonfunctional modules explicitly.
Have your process engineer review the proposed chemistry against the documented wetted materials and installed dispense path. Request the chuck, cassette interface, filtration, exhaust and utility requirements for the offered setup. Do not assume an SVG 8800, SVG 8900 or TEL component is a direct substitute.
Use the SVG spin coater and track guide to prepare related configuration questions.
Set coat, bake and develop acceptance criteria
Have your process engineer choose the recipe, monitor wafers and metrology. Define coating thickness and uniformity targets, edge-bead requirements, bake verification and development inspection criteria before the demonstration. Where an exposure step is part of the trial, document that equipment and its settings separately.
Request the raw measurements and recipe settings, not only photographs of finished wafers. Ask qualified personnel to demonstrate handling, dispense repeatability, leak checks and alarm/interlock functions under site-approved procedures. Record any module that is bypassed or excluded from the trial.
For production planning, specify how the trial will measure cycle time and what operations it includes. Do not use an unverified wafers-per-hour figure as an acceptance promise.
Review spares and controls before committing
Request part numbers and revisions for proposed spare nozzles, chucks, cups, controllers and interface boards. Have the service provider confirm fit against the actual assembly. Keep proposed alternatives separate from verified replacements in the quote.
Ask for controller backups, software access, interface documentation, maintenance records and a list of unresolved faults. Specify the host-communication functions you need and request a demonstration rather than assuming protocol support.
The used lithography equipment guide offers related procurement questions for the surrounding process equipment.
What to request in the quote
Ask for separate pricing for the track, refurbishment, missing modules, spare parts, removal, transport, installation and acceptance support. Define responsibility for chemistry removal and equipment release before scheduling collection.
SVG or TEL? Evaluate each offered configuration against the same process and acceptance plan. Require evidence for any claim about throughput, consumable cost or replacement-part fit before using it in the comparison.
What should I send first? Send the wafer format, chemistry, required sequence, measurement targets and destination. Ask for the module list and proposed acceptance run in reply.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.