Correction — September 30, 2026: Our previous pricing was insufficiently supported, and the technical comparison contained errors. We apologize. We have removed the price ranges and replaced the unsupported specifications and buying verdict with OEM-sourced distinctions. We have no verified replacement market-value range.
What KLA documented
Both systems are unpatterned wafer defect inspection platforms using DUV optical technology. The earlier characterization of SP3 as a HeNe/CCD, 200mm-only platform was incorrect.
| OEM announcement | SP3 | SP5 |
|---|---|---|
| Introduction | July 11, 2011 | July 7, 2014 |
| Illumination | DUV source and DUV-optimized optics | Enhanced DUV optical technologies |
| Stated application | Substrate manufacturing and process monitoring at the 28nm device node and below | Defect inspection for development and production of 16nm and below devices |
| Published distinction | New stage/image computer and integrated SURFmonitor | OEM reported sub-20nm defect sensitivity and throughput up to three times SP3 |
Sources: KLA SP3 announcement and KLA SP5 announcement. These are historical OEM platform claims, not acceptance guarantees for any used system. Device node and particle-size sensitivity are different metrics.
Verify the actual configuration
Require the nameplate, serial-linked configuration, handler/wafer-size documentation, software version, enabled options and service history. Do not infer wafer diameter from the model comparison or assume a family brochure's options are installed on every unit.
Compare both candidates under the required wafer material, surface, defect types, reference standards, recipe, throughput and repeatability criteria. Have your metrology team agree the test method and pass/fail limits before purchase. A newer platform is not automatically the better fit, and an older platform is not automatically qualified for a mature-node application.
No supported price or availability ranking
We have withdrawn both used-price ranges and the unsupported assertion that SP3 is cheaper or more widely available. Request a current, asset-specific quote. Separate tool cost from repairs, software rights, packing, freight, installation, acceptance and warranty. An advertised ask is not a completed sale or an independent comparable if the same machine is advertised more than once.
Buying decision
Choose only after the specific unit demonstrates the required inspection result and its commercial scope is documented. Confirm title/authority to sell, location, completeness, software-transfer rights and available service. This comparison does not establish current stock, certification or warranty on either platform.
Read the corrected SP3 buying guide or request a scoped quote.