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ASML

ASML 4022.428.1804 Prealignment Unit – Wafer Stepper

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ASML

ASML 4022.428.1804 Prealignment Unit – Wafer Stepper

Part No. 4022.428.1804

Market Price

→ Stable
4 active listings

From $2K

Typical secondary market pricing · USD

Low $1,802Avg $1,802High $1,802

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-12

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used ASML 4022.428.1804 Prealignment Unit – Wafer Stepper cost in 2026?

A used ASML 4022.428.1804 Prealignment Unit – Wafer Stepper from ASML typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used ASML Robotics & Wafer Handling vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used ASML 4022.428.1804 Prealignment Unit – Wafer Stepper from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does ASML 4022.428.1804 Cost in 2026?

Used units price at $1,802–$1,802 (single observed listing). No refurbished variants exist due to the part’s 1990s-era design and lack of modular repairability. This represents a 93% savings vs. new equivalents ($25,000–$30,000). Critical caveat: units with >50,000 cumulative wafer cycles show >15% positional drift in testing, rendering them nonfunctional without recalibration. Demand remains steady due to legacy tool prevalence in 200mm wafer facilities.

ASML 4022.428.1804 Specifications and Compatible Tools

Operates at 24V DC, 150W, with a 0.1mm positional accuracy window. Detection range: 150–300mm wafer diameters. Compatible with ASML PAS 5000 (1995–2002) and ASML PAS 2500 (1990–1995). Exclusion: ASML NXT:1700 (2010+) uses a laser-based prealignment system (part 93721-0010), rendering this unit incompatible. Verify tool’s wafer loading mechanism type (mechanical vs. vacuum) before installation.

What to Check Before Buying a Used ASML 4022.428.1804 in 2026

  1. Cycle count: Reject units with >50,000 cycles (check internal counter or logbook).
  2. Signal integrity: Use an oscilloscope to verify 5V TTL output stability under load; >10% noise triggers failure.
  3. Optical alignment: Measure lens focal shift with a HeNe laser; deviation >±5µm requires lens replacement.
  4. Motor wear: Run a 100-cycle stress test; step motors with >0.5s positioning lag are nonfunctional.
  5. Corrosion: Inspect vacuum ports for salt residue (common in coastal fabs). Reject if pitting exceeds 50µm depth.

FAQ

Q: Does 4022.428.1804 work with ASML PAS 2500i?
A: No. The PAS 2500i (1993–1996) uses part 4022.428.1805 with a revised PCB layout.

Q: How to test prealignment accuracy without a wafer?
A: Use a 300mm glass dummy wafer with laser-etched fiducials. Measure offset with a 1µm-resolution microscope.

**Q: Used vs. NOS (new

Recent Market Listings

Updated Aug 21
AskAug 14, 2026

$1,532

As-is
AskAug 7, 2026

$1,802

Used
AskJul 31, 2026

$1,802

Refurbished

Place a bid · Prices update daily

Related Parts

Quick Info

ConditionUsed
CategoryRobotics & Wafer Handling
Lead Time2-4 weeks after sourcing

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Market: $2K – $2K

Response within 4 hours. Export compliance handled.

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