4022.435.8014 — Wafer Chuck, PAS 5500/300 i-Line (ASML)

Name: 4022.435.8014 — Wafer Chuck, PAS 5500/300 i-Line (ASML)
Brand: ASML
SKU: 4022.435.8014
Price: 1802 USD
Availability: InStock

Part No. 4022.435.8014

Market Price

→ Stable

4 active listings

From $2K

Typical secondary market pricing · USD

Low $1,802Avg $1,802High $1,802

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used 4022.435.8014 — Wafer Chuck, PAS 5500/300 i-Line (ASML) cost in 2026?

A used 4022.435.8014 — Wafer Chuck, PAS 5500/300 i-Line (ASML) from ASML typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used ASML Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 4022.435.8014 — Wafer Chuck, PAS 5500/300 i-Line (ASML) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 4022.435.8014 Cost in 2026?

In 2026, used 4022.435.8014 wafer chucks trade between $463,500 (as-is, untested) and $1,065,000 (refurbished with ASML-certified calibration). Refurbished units in this range include vacuum port replacements, RF coil rework, and full ESD compliance checks. Savings against new OEM pricing (estimated >$1.5M) reach 50–70%, but only for units with <40,000 RF-hours. Units exceeding this threshold often require coil replacement, adding $120k–$180k to the cost. Note: ASML no longer lists this part on its 2026 BOM for PAS 5500/300, so refurbished options are the only viable path.

4022.435.8014 Specifications and Compatible Tools

Key specs: 24V DC power supply, 13.56 MHz RF frequency, vacuum pressure rating of 25 mTorr, and a maximum clamping force of 15 N. Compatible with ASML PAS 5500/300 (200mm wafers) and PAS 5500/350 (300mm wafers), produced 1998–2005. Warning: Do not install this part on systems using 4022.435.8015 (300mm-only variant); mismatched vacuum ports cause catastrophic wafer loss. Cross-reference tool serial numbers with ASML’s 2026 compatibility matrix before purchase.

What to Check Before Buying a Used 4022.435.8014 in 2026

RF coil resistance: Use a multimeter to measure <0.1Ω between pins 12–14. >0.2Ω indicates coil degradation.
Vacuum port integrity: Pressure test with a Pirani gauge; maintain <10 mTorr for 5 minutes. Leaks >5 mTorr disqualify.
Thermal stress cracks: Inspect the ceramic base for hairline fractures using a 10X loupe. Reject any with >2 cracks.
Calibration date: Units last calibrated pre-2018 require full recalibration ($45k–$60k).
Wafer release history: Units with >60k wafer cycles show increased particle generation. Demand cycle logs.

FAQ

Q: Can I use this on a PAS 5500/350?
A: Yes, but only if the tool’s vacuum manifold matches the 4022.435.8014 port layout. Confirm with your tool’s schematics.

Q: Is a refurbished unit better than new?
A: No new units exist. Refurbished is your only option. Ensure it includes ASML’s 2026 ESD upgrade kit.

Q: How do I verify the RF coil condition?
A: Request a coil resistance test log. Units with >0.1Ω or >40k RF-hours need coil replacement.

Q: Why is the price range so wide?
A: Refurb costs vary by condition. Units needing vacuum port or coil work push prices toward the upper range.