ASML 4022-486-5214 Wafer Chuck for NXT:1950i Lithography

Name: ASML 4022-486-5214 Wafer Chuck for NXT:1950i Lithography
Brand: ASML
SKU: 4022-486-5214
Price: 1802 USD
Availability: InStock

Part No. 4022-486-5214

Market Price

→ Stable

4 active listings

From $2K

Typical secondary market pricing · USD

Low $1,802Avg $1,802High $1,802

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for ASML 4022-486-5214 Wafer Chuck for NXT:1950i Lithography

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used ASML 4022-486-5214 Wafer Chuck for NXT:1950i Lithography cost in 2026?

A used ASML 4022-486-5214 Wafer Chuck for NXT:1950i Lithography from ASML typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used ASML Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used ASML 4022-486-5214 Wafer Chuck for NXT:1950i Lithography from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does ASML 4022-486-5214 Cost in 2026?

Used units range from $15,000–$25,000, while refurbished models (with <5,000 wafer cycles) cost $25,000–$35,000. New OEM parts exceed $100,000, offering 75–85% savings for used and 65–75% for refurbished. Caveat: Units with >15,000 wafer cycles show 30% higher failure rates during high-voltage clamping (500–1,200V DC). Always verify vacuum seal integrity and insulation resistance (>10GΩ) before purchase.

ASML 4022-486-5214 Specifications and Compatible Tools

Key specs: 500–1,200V DC clamping voltage, max 350°C operational temp, 300mm wafer ID, 0.1mm flatness tolerance. Compatible with:

ASML NXT:1950i (2015–2020 production)
ASML NXT:1970Pi (2018–2022 production)
TWINSCAN XT:1900Hi (2017–2019 production)
Exclusion: Not compatible with ASML NXT:1700 series (Part 4022-486-5102) due to differing voltage regulators. Verify tool’s power supply model (PS-486A vs PS-486B) before installation.

What to Check Before Buying a Used ASML 4022-486-5214 in 2026

Insulation resistance: Use a megohmmeter; reject if <10GΩ at 1,000V DC.
Vacuum hold time: Apply 100mTorr and measure decay; must hold >5 minutes.
Surface wear: Profile with a 3D laser scanner; flatness >2μm deviation invalidates spec.
Wafer cycle count: Reject units with >15,000 cycles (lifespan threshold).
O-ring condition: Check for cracks via UV light; replace if >3 years old (standard O-ring lifecycle).

FAQ

Q: What causes ASML 4022-486-5214 failure?
A: Voltage spikes during EUV exposure and O-ring degradation from thermal cycling.

Q: Used vs refurbished—what’s the difference?
A: Used parts are resold as-is; refurbished units include replaced O-rings, vacuum seals, and insulation coatings.