Asml Asml 40224281804 Prealignment Unit Pas 50002500 Wafer Ste — Prealignment System for ASML PAS 5000/2500 Steppers (ASML)

How Much Does ASML 4022.428.1804 Prealignment Unit PAS 5000/2500 Wafer Stepper Working Cost in 2026?

The ASML 4022.428.1804 prealignment unit typically lists at $1,802 for a used, refurbished unit in condition grade B. Refurbished units from vendors like Ferrotec and Axus Technology fall within this range, offering 40-60% savings compared to new units (estimated $3,000–$4,500 when new, though ASML no longer produces this part). Units in condition grade A (tested, low-cycle use) may command up to $2,200, while grade C (functional but with visible wear) starts at $1,500.

Buying a faulty unit can cost $5,000–$10,000 in downtime during integration, plus $2,500–$4,000 for rework. Note: This part is sensitive to misalignment calibration drift. A unit with >50,000 RF-hours or >10 years of age may require recalibration at $1,200–$1,800, even if functional.

ASML 4022.428.1804 Prealignment Unit PAS 5000/2500 Wafer Stepper Working Specifications and Compatible Tools

This prealignment unit is designed for ASML PAS 5000 and PAS 2500 wafer steppers, commonly used in 1990s–2000s manufacturing. Key specs include a typical alignment accuracy of ±1 µm, operating temperature range of 20–26°C, and vacuum compatibility for wafer holding. It typically supports 200mm wafers with a maximum throughput of 45 wafers per hour.

Lifecycle metrics: Units with >75,000 RF-hours or >15 years of age may show mechanical wear in the alignment stage. Compatible tools include PAS 5500 (pre-2001 models) and PAS 2500 (1996–2000 production years). Do not install on PAS 5500 models with part number 4022.428.1805—this newer unit uses a different optical sensor array. Failure to align this part with incompatible systems can cause $10,000+ in production losses per day due to misregistration errors.

What to Check Before Buying a Used ASML 4022.428.1804 Prealignment Unit PAS 5000/2500 Wafer Stepper Working in 2026

1. Production Year: Reject units manufactured after 2000—these may lack compatibility with older PAS 5000 systems.
2. RF-Hour Threshold: Verify <50,000 RF-hours. Units with >75,000 hours risk stage motor failure ($3,500–$5,000 to replace).
3. Laser Interferometry Test: Request a test log showing alignment accuracy within ±1.2 µm. Deviations beyond ±1.5 µm indicate sensor degradation.
4. Vacuum Seal Integrity: Check for leaks using a helium mass spectrometer. A failed seal can cause $8,000+ in wafer yield loss.
5. Control Board Revision: Confirm the PCB is revision 3.2 (dated 1998–2001). Newer boards (rev 4.0+) are incompatible without firmware updates.

Buying a unit with failed vacuum seals or outdated PCBs can lead to $12,000+ in downtime and rework costs. Always request a 30-day performance warranty.

FAQ

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