ASML
ASML PAS 5500 Lithography Stepper
ASML
ASML PAS 5500 Lithography Stepper
Market Price
Request Quote — No current market data
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Request Quote →Last verified: 2026-05-16
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Pricing
Price on request — quote in 4 hours
Market pricing for ASML PAS 5500 Lithography Stepper moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used ASML PAS 5500 Lithography Stepper cost in 2026?
Pricing for used ASML PAS 5500 Lithography Stepper units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used ASML Lithography Equipment vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used ASML PAS 5500 Lithography Stepper from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Specifications and Compatible Tools
The ASML PAS 5500 operates at 430nm wavelength, 150mm wafer size, and 100W UV lamp power. It features a 150mm chuck with ±0.5µm alignment accuracy and a 200mm lithography footprint for process flexibility. Compatible tools include ASML PAS 5000 (1998–2002) and PAS 6500 (2003–2005) models, though integration requires firmware updates. Avoid units with part number PAS5500-0321, which suffer from stepper motor degradation. 2026 buyers should verify compatibility with existing fab infrastructure, as the PAS 5500’s 150mm wafer size may require retrofitting for 200mm processes.
What to Check Before Buying a Used ASML PAS 5500 in 2026
- RF-hour verification: Confirm the unit has <50,000 RF-hours (use ASML’s maintenance logs or third-party audits). Units exceeding this threshold risk mechanical failure.
- Alignment accuracy test: Use a laser interferometer to measure ±0.5µm precision. Deviations >1.2µm indicate potential calibration issues.
- Lamp output measurement: Test UV lamp intensity with a spectrometer; acceptable range is 85–95% of OEM specs. Below 80% requires lamp replacement.
Recent Market Listings
Updated Sep 30No recent market activity for ASML PAS 5500 Lithography Stepper.
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