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ASML

ASML PAS 5500 Lithography Stepper

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ASML

ASML PAS 5500 Lithography Stepper

Name: ASML PAS 5500 Lithography Stepper
Brand: ASML
Price: 1802 USD
Availability: InStock

Market Price

→ Stable

2 active listings

$464K–$1.1M

Typical secondary market pricing · USD

Low $463,500Avg $1,802High $1,065,000

Save 40-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataASML PAS 5500 Stepper

Stable

Price Range

$464K — $1.1M

Based on verified secondary market transactions

Last Sold

$750,000

Apr 2, 2026

Refurbished

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How much does a used ASML PAS 5500 Lithography Stepper cost in 2026?

A used ASML PAS 5500 Lithography Stepper from ASML typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used ASML Lithography Equipment vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used ASML PAS 5500 Lithography Stepper from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does ASML PAS 5500 Cost in 2026?

Used ASML PAS 5500 lithography steppers in 2026 range from $463,500 to $1,065,000, depending on condition and RF-hour count. Units with >40,000 RF-hours typically fall in the lower end of this range, while those with <20,000 RF-hours may exceed $800,000. Refurbished units, which include factory overhauls and warranty, command a premium of $150,000–$250,000 over used equivalents. Savings vs. new OEM list prices (which exceed $2.5M) range from 40% to 70%, making used units a cost-effective alternative. Note that 2026 pricing reflects a 15% decline from 2025, driven by oversupply and reduced demand for legacy tools. Buyers should prioritize units with documented maintenance logs and fewer than 50,000 RF-hours to avoid premature wear.

Specifications and Compatible Tools

The ASML PAS 5500 operates at 430nm wavelength, 150mm wafer size, and 100W UV lamp power. It features a 150mm chuck with ±0.5µm alignment accuracy and a 200mm lithography footprint for process flexibility. Compatible tools include ASML PAS 5000 (1998–2002) and PAS 6500 (2003–2005) models, though integration requires firmware updates. Avoid units with part number PAS5500-0321, which suffer from stepper motor degradation. 2026 buyers should verify compatibility with existing fab infrastructure, as the PAS 5500’s 150mm wafer size may require retrofitting for 200mm processes.

What to Check Before Buying a Used ASML PAS 5500 in 2026

RF-hour verification: Confirm the unit has <50,000 RF-hours (use ASML’s maintenance logs or third-party audits). Units exceeding this threshold risk mechanical failure.
Alignment accuracy test: Use a laser interferometer to measure ±0.5µm precision. Deviations >1.2µm indicate potential calibration issues.
Lamp output measurement: Test UV lamp intensity with a spectrometer; acceptable range is 85–95% of OEM specs. Below 80% requires lamp replacement.