ASML PAS 5500 Stepper Parts

Name: ASML PAS 5500 Stepper Parts
Brand: ASML
Price: 1802 USD
Availability: InStock

Market Price

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From $2K

Typical secondary market pricing · USD

Low $1,802Avg $1,802High $1,802

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Available by Request

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used ASML PAS 5500 Stepper Parts cost in 2026?

A used ASML PAS 5500 Stepper Parts from ASML typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used ASML Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used ASML PAS 5500 Stepper Parts from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does ASML PAS 5500 Stepper Parts Cost in 2026?

Used ASML PAS 5500 stepper parts (e.g., exposure modules, lens assemblies, motion controllers) typically range from $15,000 to $85,000 in 2026, depending on age and condition. Refurbished variants with OEM-certified upgrades (e.g., UV-coated optics, updated stepper motors) cost $25,000 to $95,000, offering 40–65% savings over new equivalents (which exceed $200,000). Caveat: Parts with >15,000 exposure cycles may require costly reticule alignment recalibration, adding 10–15% to total cost. Always verify cycle count in the part’s maintenance log.

ASML PAS 5500 Stepper Parts Specifications and Compatible Tools

Key specs: i-line (365nm) and KrF (248nm) excimer laser compatibility, 0.5–0.6 numerical aperture (NA), 130nm resolution, 24V DC power supply, and 50–60Hz frequency. Compatible tools include:

PAS 5500/300 (1995–1997)
PAS 5500/500 (1996–1998)
PAS 5500/550 (1997–1999)
PAS 5500/750 (1998–2000)
PAS 5500/900 (1999–2001)

Exclusion warning: Do not install PAS 5500 parts into ASML NXT:1700 (2022+) EUV systems—wavelength mismatch causes catastrophic lens failure. Cross-check part number prefixes (e.g., 5500-XXXX) for compatibility.

What to Check Before Buying a Used ASML PAS 5500 Stepper Part in 2026

Exposure cycle count: Reject parts with >18,000 cycles (wear accelerates after 15,000).
Voltage stability: Use a multimeter to confirm 24V DC ±2% under load; >5% deviation indicates failing power stages.
Lens contamination: Inspect with a 10x UV microscope for >0.5µm particles—KrF optics are irreparably damaged by >1µm debris.
Stage alignment: Measure X/Y axis drift with a He-Ne laser interferometer; >0.1µm error requires full recalibration.
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