ASML Stepper & Scanner Parts

Name: ASML Stepper & Scanner Parts
Brand: ASML
Price: 1802 USD
Availability: InStock

Market Price

→ Stable

4 active listings

From $2K

Typical secondary market pricing · USD

Low $1,802Avg $1,802High $1,802

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used ASML Stepper & Scanner Parts cost in 2026?

A used ASML Stepper & Scanner Parts from ASML typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used ASML Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used ASML Stepper & Scanner Parts from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does ASML Stepper & Scanner Parts Cost in 2026?

Used ASML stepper/scanner components (e.g., exposure modules, stage motors, laser interferometers) typically range from $15,000 to $250,000 in 2026, depending on criticality and condition. Refurbished parts with OEM-certified rebuilds command 15–30% premiums over used equivalents. For example, a used TWINSCAN XT:1200 stage motor (2003 vintage) might cost $45,000 versus $62,000 new in 2023—a 28% savings. Caveat: Parts with >10,000 scan hours or >15 years of age often require derating; expect price cuts of 20–40% for such components unless paired with a service contract.

ASML Stepper & Scanner Specifications and Compatible Tools

Key specs vary by platform:

PAS 5500 SE: 365nm/248nm exposure, 0.45 NA, 120W mercury lamp, 1.5m/s stage speed
TWINSCAN XT:1200: 248nm/193nm, 0.75 NA, 180W excimer laser, 3.2m/s dual-stage
Voltage/Frequency: 208V 3-phase, 50/60Hz (all models)
Compatible tools include PAS 5500 SE (1998–2003), TWINSCAN XT:1200 (2001–2006), and NXT:1000 (2004–2008). Warning: Do not install PAS 5500 optics in NXT:1700+ EUV systems (part #940-000123); NA mismatches cause catastrophic focus errors.

What to Check Before Buying a Used ASML Stepper & Scanner Part in 2026

Mechanical wear: Measure stage linear guides with a micrometer; >5µm flatness deviation rejects.
Electrical integrity: Use a Fluke 434 II to log power draw; >15% variance from spec sheet indicates failing drivers.
Optical alignment: Test lens distortion with a HeNe laser interferometer; >0.25µm wavefront error invalidates ArF compatibility.
Software version: Confirm firmware supports your tool’s recipe set (e.g., PAS 5500 SE requires v3.2.1 or later).
Lifespan metrics: Reject components >18 years old or with >12,000 cumulative exposure cycles without rebuild logs.

FAQ

Q: Are ASML PAS 5500 parts compatible with TWINSCAN XT systems?
A: Only mechanical spares (e.g., vacuum pumps, cooling manifolds) cross-compat. Optics/lasers require NA and wavelength matching.

Q: Used vs. refurbished ASML scanner parts—what’s the difference?
A: Refurbished