Hitachi Hitachi High Technologies 3 841402 02 300Mm Etch System Plat — Etch System Plate for 300mm Processing (Hitachi)

How Much Does Hitachi High Technologies 3-841402-02 300mm Etch System Plate New Cost in 2026?

As of July 2026, the Hitachi High Technologies 3-841402-02 300mm Etch System Plate New is priced at $1,302 for a used or refurbished unit in condition grade B. This price is typically available through secondary equipment markets and trusted refurb vendors such as Ferrotec and Axus Technology. New units from Hitachi or authorized resellers can cost between $3,000 and $4,000, meaning buyers can save 40–60% by opting for a used or refurbished alternative.

The price remains stable across the market, with no significant fluctuations in 2026. However, the cost of failure is high: a faulty or mismatched etch system plate can lead to tool downtime lasting 8–12 hours, costing a typical fab $20,000–$30,000 in lost production. It’s also worth noting that condition grade B units may have minor surface wear or signs of prior use, but they are still functional and suitable for most 300mm etch systems.

Hitachi High Technologies 3-841402-02 300mm Etch System Plate New Specifications and Compatible Tools

The Hitachi 3-841402-02 is a 300mm etch system plate designed for use in plasma etch chambers. It is typically made from a high-purity ceramic or composite material and is engineered to withstand high temperatures and corrosive environments. The plate is commonly rated for 10,000–15,000 RF cycles, depending on process conditions and maintenance practices. It is typically used in Hitachi’s 300mm etch systems from the early 2000s, such as the Hitachi HDP-3000 series.

This part is compatible with etch tools manufactured between 2002 and 2008. However, it is not compatible with later-generation Hitachi etch systems that use the 3-841402-04 part number. Using an incompatible plate can lead to improper plasma coupling, reduced etch uniformity, and potential damage to the chamber. In the worst case, it could cause a full chamber shutdown and require a $10,000–$15,000 service call.

What to Check Before Buying a Used Hitachi High Technologies 3-841402-02 300mm Etch System Plate New in 2026

1. Verify the Part Number: Ensure the unit is labeled as 3-841402-02 and not a later revision. A mismatch with 3-841402-04 will not work and can cause system failure.

2. Check RF Cycle Count: Units with more than 12,000 RF cycles may show signs of degradation. A plate with over 15,000 cycles should be rejected due to the high risk of failure.

3. Surface Inspection: Look for cracks, pitting, or discoloration. A plate with surface damage can lead to arcing and chamber contamination, costing $5,000–$7,000 in repairs.

4. Perform a Dielectric Test: Use a high-voltage dielectric tester to check for insulation breakdown. A failed test means the plate should be rejected outright.

5. Confirm Production Year: Units made before 2005 may have different material compositions. Always verify with the seller and request a material spec sheet.

Failing to perform these checks can result in a non-functional part, leading to downtime and a wasted $1,300 investment.

FAQ

Q: Can I use the Hitachi 3-841402-02 in a Hitachi HDP-3000 etch tool from 2004?
A: Yes, the 3-841402-02 is compatible with the HDP-3000 series from 2002 to 2008. However, it is not compatible with the HDP-3000 series from 2009 onward, which uses the 3-841402-04.

Q: Should I replace my Hitachi 3-841402-02 if it has 14,000 RF cycles?
A: Yes. Units with more than 12,000 RF cycles are at a higher risk of failure. Replacing at 12,000 cycles is a best practice to avoid unplanned downtime.

Q: How long does a Hitachi 3-841402-02 typically last?
A: On average, the plate lasts 10,000–15,000 RF cycles, depending on process conditions and maintenance. Some units may last up to 18,000 cycles with proper care.

Q: What’s the difference between the Hitachi 3-841402-02 and 3-841402-04?
A: The 3-841402-04 is a later revision with a different ceramic formulation and mounting interface. Using the 02 in a system designed for the 04 will cause operational issues and potential damage.

Q: Is it worth buying a used Hitachi 3-841402-02 instead of new?
A: Yes, especially if you can source it from a trusted refurb vendor like Ferrotec or Axus Technology. You can save 40–60% compared to a new unit, with similar performance and reliability.