KLA 2135 Wafer Inspection System

Name: KLA 2135 Wafer Inspection System
Brand: KLA Corporation

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for KLA 2135 Wafer Inspection System moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used KLA 2135 Wafer Inspection System cost in 2026?

Pricing for used KLA 2135 Wafer Inspection System units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used KLA Corporation Semiconductor Metrology & Inspection vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used KLA 2135 Wafer Inspection System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

KLA 2135 Specifications and Compatible Tools

Key specs: 193nm DUV laser (200W output), 0.95 NA objective, 120mm/sec scan speed, 12V DC power supply (3-phase 480V input). Compatible with KLA 29xx series (2015–2019), Applied Materials Centura platforms (2017–2021), and Lam Research P5000 etchers (2016–2020). Exclusion: Do not install on Nikon NSR-S633 (2022+) without firmware upgrade (part #KLAP-2135-FWV3.2). Cross-check tool’s vacuum interface (ISO-F 400 standard) and software API version (v2.1 minimum).

What to Check Before Buying a Used KLA 2135 in 2026

Laser source hours: Reject units >18,000 hours (use KLA T2000 diagnostic tool to log runtime).
Optical alignment: Measure NA consistency with a Zygo Interferometer (deviation >0.02 NA invalidates spec).
Vacuum system: Test base pressure <5×10⁻⁶ Torr using a Pfeiffer Pröve 300 mass spectrometer.
Software compliance: Confirm v2.1+ supports 28nm node protocols (check calibration certificates post-2021).

FAQ

Q: Is KLA 2135 compatible with 1xnm semiconductor nodes?
A: No. It targets 90nm–28nm nodes. For 14nm+, upgrade to KLA 39xx series.

Q: Used vs refurbished KLA 2135: which is better?
A: Refurbished units (certified by KLA) include warranty and recalibrated optics. Used systems may require immediate UV lamp replacement.