KLA Corporation
KLA 2135 Wafer Inspection System
KLA Corporation
KLA 2135 Wafer Inspection System
Market Price
→ Stable$189K–$315K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
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Market Data
Coming Soon for KLA 2135 Wafer Inspection System
Price history and market activity data is being compiled.
How much does a used KLA 2135 Wafer Inspection System cost in 2026?
A used KLA 2135 Wafer Inspection System from KLA Corporation typically sells for $189k – $315k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used KLA Corporation Semiconductor Metrology & Inspection vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used KLA 2135 Wafer Inspection System from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does KLA 2135 Wafer Inspection System Cost in 2026?
Used systems price between $189,000–$315,000 in 2026, with refurbished units averaging $275,000. Refurbished models include recalibrated optics, replaced laser sources, and updated software licenses. New KLA 2135 systems (if available) exceed $2.5M, offering ~92% savings by opting for used. Caveat: Systems with >15,000 laser source hours (typical in 2018–2020 deployments) require costly UV lamp replacement ($45,000–$65,000). Always verify inspection logs for documented defect detection rates (≥98.5% sensitivity on 28nm nodes).
KLA 2135 Specifications and Compatible Tools
Key specs: 193nm DUV laser (200W output), 0.95 NA objective, 120mm/sec scan speed, 12V DC power supply (3-phase 480V input). Compatible with KLA 29xx series (2015–2019), Applied Materials Centura platforms (2017–2021), and Lam Research P5000 etchers (2016–2020). Exclusion: Do not install on Nikon NSR-S633 (2022+) without firmware upgrade (part #KLAP-2135-FWV3.2). Cross-check tool’s vacuum interface (ISO-F 400 standard) and software API version (v2.1 minimum).
What to Check Before Buying a Used KLA 2135 in 2026
- Laser source hours: Reject units >18,000 hours (use KLA T2000 diagnostic tool to log runtime).
- Optical alignment: Measure NA consistency with a Zygo Interferometer (deviation >0.02 NA invalidates spec).
- Vacuum system: Test base pressure <5×10⁻⁶ Torr using a Pfeiffer Pröve 300 mass spectrometer.
- Software compliance: Confirm v2.1+ supports 28nm node protocols (check calibration certificates post-2021).
- Mechanical wear: Inspect stage linear motors for >5μm positional drift (use Renishaw XL80 laser gauge). Units >10 years old often require motor replacement ($32,000–$50,000).
FAQ
Q: Is KLA 2135 compatible with 1xnm semiconductor nodes?
A: No. It targets 90nm–28nm nodes. For 14nm+, upgrade to KLA 39xx series.
Q: Used vs refurbished KLA 2135: which is better?
A: Refurbished units (certified by KLA) include warranty and recalibrated optics. Used systems may require immediate UV lamp replacement.
**Q:
Recent Market Listings
Updated May 19$160,650
As-is$226,800
Used$277,200
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $160,650 | As-is | May 12, 2026 |
| Ask | $226,800 | Used | May 5, 2026 |
| Ask | $277,200 | Refurbished | Apr 28, 2026 |
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Quick Info
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Market: $189K – $315K
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