KLA (formerly KLA-Tencor)
KLA 2351 Overlay Metrology System
KLA (formerly KLA-Tencor)
KLA 2351 Overlay Metrology System
Market Price
→ Stable$189K–$315K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for KLA 2351 Overlay Metrology System
Price history and market activity data is being compiled.
How much does a used KLA 2351 Overlay Metrology System cost in 2026?
A used KLA 2351 Overlay Metrology System from KLA (formerly KLA-Tencor) typically sells for $189k – $315k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used KLA (formerly KLA-Tencor) Metrology vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used KLA 2351 Overlay Metrology System from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does KLA 2351 Overlay Metrology System Cost in 2026?
Used systems price between $189,000–$315,000 in 2026, depending on calibration history and optics condition. Refurbished units (with <18-month-old laser modules and full software updates) add 12–18% to the base price. New systems from KLA exceed $525,000, offering 37–50% savings by opting for used. Critical caveat: systems with >5 years since last metrology calibration (per KLA-2351-TC-003 specs) require mandatory recalibration at ~$28,000, often unaccounted in initial budgets.
KLA 2351 Specifications and Compatible Tools
Overlay accuracy: ±0.8 nm (3σ) at 248nm wavelength. Throughput: 120 wafers/hour (200mm). Power draw: 3.2 kW at 208VAC, 50/60Hz. Compatible with KLA 2350 (2001–2007), 2351 (2003–2010), and 2360 (2005–2012) systems. Also integrates with Applied Materials Centura platforms (pre-2015) via KLA-2351-IF-01 interface module. Exclusion: Not compatible with KLA 2380 systems (2018+) due to incompatible StageControl v4.2+ firmware. Verify tool’s metrology port dimensions (min. 450mm x 320mm clear space required).
What to Check Before Buying a Used KLA 2351 in 2026
- Laser stability: Use a wavemeter to confirm 248nm emission deviation <±0.05nm (spec per KLA-2351-MT-001).
- Optics contamination: Inspect beam splitter for >5% haze (measured via integrating sphere, reject if >3% light loss).
- Stage repeatability: Run 50-cycle XY stage test; reject if standard deviation exceeds 1.2nm (per KLA-2351-TS-007 protocol).
- Software lifecycle: Systems with K2OS v3.9
Recent Market Listings
Updated May 19$160,650
As-is$226,800
Used$277,200
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $160,650 | As-is | May 12, 2026 |
| Ask | $226,800 | Used | May 5, 2026 |
| Ask | $277,200 | Refurbished | Apr 28, 2026 |
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Market: $189K – $315K
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