KLA (formerly KLA-Tencor)
KLA 2351 Overlay Metrology System
KLA (formerly KLA-Tencor)
KLA 2351 Overlay Metrology System
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for KLA 2351 Overlay Metrology System moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used KLA 2351 Overlay Metrology System cost in 2026?
Pricing for used KLA 2351 Overlay Metrology System units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used KLA (formerly KLA-Tencor) Metrology vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used KLA 2351 Overlay Metrology System from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
KLA 2351 Specifications and Compatible Tools
Overlay accuracy: ±0.8 nm (3σ) at 248nm wavelength. Throughput: 120 wafers/hour (200mm). Power draw: 3.2 kW at 208VAC, 50/60Hz. Compatible with KLA 2350 (2001–2007), 2351 (2003–2010), and 2360 (2005–2012) systems. Also integrates with Applied Materials Centura platforms (pre-2015) via KLA-2351-IF-01 interface module. Exclusion: Not compatible with KLA 2380 systems (2018+) due to incompatible StageControl v4.2+ firmware. Verify tool’s metrology port dimensions (min. 450mm x 320mm clear space required).
What to Check Before Buying a Used KLA 2351 in 2026
- Laser stability: Use a wavemeter to confirm 248nm emission deviation <±0.05nm (spec per KLA-2351-MT-001).
- Optics contamination: Inspect beam splitter for >5% haze (measured via integrating sphere, reject if >3% light loss).
- Stage repeatability: Run 50-cycle XY stage test; reject if standard deviation exceeds 1.2nm (per KLA-2351-TS-007 protocol).
- Software lifecycle: Systems with K2OS v3.9
Recent Market Listings
Updated Sep 30No recent market activity for KLA 2351 Overlay Metrology System.
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