KLA AIT Advanced Inspection Tool

Market Price

→ Stable

$189K–$315K

Typical secondary market pricing · USD

Low $189,000Avg $252,000High $315,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $189K – $315K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used KLA AIT Advanced Inspection Tool cost in 2026?

A used KLA AIT Advanced Inspection Tool from KLA typically sells for $189k – $315k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used KLA Defect Inspection vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used KLA AIT Advanced Inspection Tool from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does KLA AIT Advanced Inspection Tool Cost in 2026?

Used units range from $189,000–$315,000 in 2026, with refurbished models starting at $165,000 (12% cheaper than used). New systems from KLA exceed $2.1M, offering ~93% savings by opting for pre-owned. Price varies with wafer throughput history: tools with <50,000 processed wafers command the higher end of the range. Critical caveat: systems with >10 years of operation (pre-2016 vintage) often require costly laser optics replacement ($45K–$75K), which is excluded from base pricing.

KLA AIT Advanced Inspection Tool Specifications and Compatible Tools

Key specs: 405–976 nm multi-wavelength lasers, 12 nm defect resolution, 250 W power draw, and 150 mm–300 mm wafer compatibility. Operates at 5 VDC for imaging sensors and 208 VAC three-phase for core systems. Compatible with KLA 29XX Series (2015–2018 production) and 30XX Series (2017–2020). Works with Applied Materials Centura platforms for post-etch inspection. Exclusion: Not compatible with KLA 3600i (PN 3600-00123) due to conflicting vacuum interface protocols. Verify tool’s software revision (Rev G or later) for AIT integration.

What to Check Before Buying a Used KLA AIT Advanced Inspection Tool in 2026

Laser alignment: Use a HeNe interferometer to measure beam deviation. Reject if >2 microns at 633 nm.
Power supply stability: Measure DC ripple with a Fluke 434 II. >3% variance indicates failing capacitors.
Vacuum system integrity: Test base pressure with a Pfeiffer Baratron. Must reach <1×10⁻⁶ Torr in 12 minutes.
Wafer stage calibration: Run a 100-point grid test. >5 µm positional error requires servo motor replacement.
Maintenance history: Demand logs showing PM within last 5 years. Systems without records risk hidden costs (e.g., $60K for optics realignment).