Mattson 303-00595-00 200mm Wafer CVD Heater Assembly

How Much Does Mattson 303-00595-00 Cost in 2026?

Used units typically range from $15,000 to $25,000, while refurbished models with full calibration certificates cost $28,000 to $35,000. These prices represent 40–60% savings versus new OEM pricing (which exceeds $60k). Critical caveat: units with >15,000 thermal cycles in >800°C environments show 2–3x higher failure rates during stress testing. Always request cycle logs and recent thermal uniformity test data before purchase.

Mattson 303-00595-00 Specifications and Compatible Tools

Rated for 240V AC, 50/60Hz, 15–20kW power draw, and temperatures up to 800°C. Dimensions: 315mm (D) × 45mm (H). Compatible with Mattson Centura CVD 3000 (2002–2008), Fusion DP 5500 (2005–2010), and Aleris 550 (2003–2007) systems. Exclusion: Do not install in 300mm tools using part 303-00596-00—the 200mm assembly lacks the mounting flange for 300mm chamber integration. Verify tool’s RF matching network compatibility before procurement.

What to Check Before Buying a Used Mattson 303-00595-00 in 2026

1. Resistance imbalance: Use a digital multimeter to measure heating element resistance. Reject units with >5% deviation across segments (spec: 12.5–13.2Ω).
2. Insulation integrity: Apply 500V DC with a megohmmeter; minimum 100MΩ required. <50MΩ indicates dielectric degradation.
3. Thermal cycling history: Units with >18,000 cycles in >750°C processes require metallurgical inspection for graphite delamination.
4. Oxide layer thickness: Measure with a profilometer. >5µm native oxide on SiC elements correlates with 30%+ power loss.
5. Mounting hole wear: