Nikon Nikon 4K821 767 Reticle Stage Wafer Transfer Arm 4K821 768 N — Reticle Stage for NSR-620D (Nikon)

How Much Does Nikon 4K821-767 Reticle Stage Wafer Transfer Arm 4K821-768 NSR-620D Working Cost in 2026?

As of July 2026, the Nikon 4K821-767 Reticle Stage Wafer Transfer Arm 4K821-768 NSR-620D Working is priced at $2,002 for a used, refurbished unit in condition grade B. This price is typically sourced through vendors like Ferrotec and Axus Technology, who specialize in high-precision semiconductor equipment. A new unit from Nikon would cost between $5,000 and $6,000, meaning buyers can save 40–60% by opting for a used, well-maintained part.

The cost of failure to replace or repair this component can be significant. If a fab is forced to halt production while waiting for a replacement, downtime can cost upwards of $10,000 per hour, depending on the line’s throughput. That’s why sourcing a reliable used unit is often the most cost-effective path.

However, it’s important to note that the condition of used parts can vary. A unit with more than 10,000 operational cycles or signs of wear may require more frequent maintenance, increasing long-term costs. Always verify the unit’s service history and test results before purchase.

Nikon 4K821-767 Reticle Stage Wafer Transfer Arm 4K821-768 NSR-620D Working Specifications and Compatible Tools

The Nikon 4K821-767 Reticle Stage Wafer Transfer Arm is a critical component in the NSR-620D photolithography system, used to precisely transfer wafers between the reticle stage and the exposure chamber. It operates with a typical resolution of 0.1 microns and a maximum travel speed of 150 mm/sec. The arm is designed for up to 15,000 operational cycles, with a typical service life of 8–10 years in continuous operation.

This part is compatible with NSR-620D systems manufactured between 2008 and 2012. It is not compatible with later models such as the NSR-620E or NSR-620F, which use a different part number: 4K821-769. Using an incompatible transfer arm can lead to misalignment errors, resulting in defective wafers and potential damage to the reticle stage. In the worst case, this could lead to a complete system shutdown and repair costs exceeding $20,000.

Verify compatibility with your system before installation. Always cross-check the part number and model year with the original equipment documentation.

What to Check Before Buying a Used Nikon 4K821-767 Reticle Stage Wafer Transfer Arm 4K821-768 NSR-620D Working in 2026

1. Operational Cycle Count: Ensure the unit has less than 10,000 cycles. Units with more than 12,000 cycles typically show increased wear and may require more frequent maintenance.

2. Lubrication and Servo Performance: Run a servo response test and a motion trace test. These tests will reveal any lag or jitter in movement. A unit with a jitter greater than 0.05 microns should be rejected.

3. Alignment Accuracy: Use a laser interferometer to check alignment. The unit should maintain a deviation of less than 0.1 microns over the full travel range. Reject if the deviation exceeds 0.2 microns.

4. Production Year: Units produced before 2010 may use older motor controllers that are harder to source. Units from 2011 onward typically use more modern, serviceable components.

5. Service History and Refurbishment: Ask for a detailed service report. Reject any unit that has not been fully disassembled, cleaned, and re-lubricated in the last 12 months. Units with incomplete service records are a high-risk purchase.

Buying a poorly maintained unit can lead to repeated failures, each costing between $5,000 and $10,000 in labor and downtime. Always inspect and test before accepting delivery.

FAQ

Q: Can I use the Nikon 4K821-767 with a NSR-620E system?
A: No. The NSR-620E uses the 4K821-769 part number. Attempting to install the 4K821-767 will result in misalignment and system errors, potentially causing $10,000+ in repair costs.

Q: Should I buy a used Nikon 4K821-767 if I need it in 2 weeks?
A: Yes, but only if the unit is in sourcing status and has a lead time of 2–4 weeks. New units can take 6–8 weeks to deliver, which could cost $15,000+ in downtime.

Q: How long can a Nikon 4K821-767 last with proper maintenance?
A: With regular servicing every 5,000 cycles, the unit can last up to 10 years. Beyond 12,000 cycles, performance degrades, and replacement becomes necessary.

Q: What’s the difference between the 4K821-767 and 4K821-768?
A: The 4K821-768 is the motor assembly, while the 4K821-767 is the full transfer arm. Both are required for full functionality. Using only one part will prevent the system from operating.

Q: How much can I save by buying used?
A: You can save 40–60% compared to a new unit. A used unit at $2,002 vs a new one at $5,000+ is a significant cost reduction, especially for older systems no longer supported by Nikon.