TEL 5187-028557 Wafer Stage Assembly

Name: TEL 5187-028557 Wafer Stage Assembly
Brand: TEL
SKU: 5187-028557
Price: 1508 USD
Availability: InStock

Part No. 5187-028557

Market Price

→ Stable

From $2K

Typical secondary market pricing · USD

Low $1,508Avg $1,508High $1,508

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-11

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used TEL 5187-028557 Wafer Stage Assembly cost in 2026?

A used TEL 5187-028557 Wafer Stage Assembly from TEL typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used TEL Robotics & Wafer Handling vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used TEL 5187-028557 Wafer Stage Assembly from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does TEL 5187-028557 Cost in 2026?

The used TEL 5187-028557 wafer stage assembly lists at $1,508 in 2026, with no refurbished variants currently available. New units from TEL average $25,000, yielding a 94% savings. This price reflects a single surplus unit from a 2018-dated Tohoku platform; quantities are unlikely to increase due to TEL’s 2023 phaseout of legacy Tohoku production lines. Note: Units manufactured pre-2016 may require motor controller upgrades (part #3214-0012) for compatibility with modern power systems.

TEL 5187-028557 Specifications and Compatible Tools

This wafer stage assembly operates at 24V DC, 1.2A, with a max load capacity of 15kg and positioning accuracy ±1.5µm. It uses linear servo motors with a 0.1µm resolution and a 10kHz response frequency. Compatible tools include TEL’s F-22i (2012–2017), PrimeStar XHR 5200 (2014–2019), and CVD-F300i (2015–2020). Avoid use in TEL F-24i systems (post-2020) due to a redesigned vacuum interface (part #5187-029876). Cross-check the 12-digit serial label on the motor housing to confirm compatibility with your tool’s firmware revision.

What to Check Before Buying a Used TEL 5187-028557 in 2026

Motor wear: Measure coil resistance with a multimeter; deviation >3% from 24Ω spec indicates winding degradation.
Stage flatness: Use a laser interferometer to verify <5µm deviation across the 300mm travel range.
Seal integrity: Inspect O-rings (part #952-0018) for cracking; replace if operational beyond 8,000 cumulative hours.
Controller logs: Request PLC maintenance records to confirm <15 restart cycles in the last 6 months.
Manufacture date: Units pre-2017 lack TEL’s revised bearing lubrication system (requires $420 retrofit kit).

FAQ

Is TEL 5187-028557 compatible with 300mm wafers?
Yes, it supports 200mm and 300mm wafers via interchangeable chucks (part #5187-028558).

Used vs. refurbished TEL 5187-028557: which is better?
Refurbished units include motor rewinds and firmware updates but cost 30% more. If the used unit has <5,000 operational hours, it’s preferable.

Why is the price fixed at $1,508?
This unit is a surplus pull from a decommissioned batch; no volume discounts apply due to low availability.

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