Tel Tokyo Electron Es3D10 201275 V1 Etch System Shutter Asse

How Much Does TEL Tokyo Electron ES3D10-201275-V1 Etch System Shutter Assembly 1.5 New Surplus Cost in 2026?

As of July 2026, the TEL ES3D10-201275-V1 Etch System Shutter Assembly is priced at $703 for a 1.5 new surplus unit. This is a B-grade condition part, typically sourced from decommissioned or end-of-life systems. The price remains stable across the market, with no significant fluctuations in the last 12 months.

If you're considering a used or refurbished option, vendors like Ferrotec and Axus Technology often offer similar parts in the $650–$750 range, depending on the condition and included documentation. A new OEM unit from TEL would cost between $1,200 and $1,500, meaning you can save 40–60% by purchasing a used or refurbished version.

However, it's important to note that a failed shutter assembly can lead to $10,000–$15,000 in lost production time per day, depending on the line it's installed on. If the part has more than 15,000 RF cycles or is over 8 years old, the risk of premature failure increases significantly. Always verify the condition and cycle count with the seller before purchase.

TEL Tokyo Electron ES3D10-201275-V1 Etch System Shutter Assembly 1.5 New Surplus Specifications and Compatible Tools

The ES3D10-201275-V1 is a mechanical shutter assembly used in TEL etch systems to control gas flow and plasma chamber access. It typically supports up to 15,000 RF cycles and is rated for 8–10 years of service life under standard operating conditions. The assembly includes a motorized actuator, sealing gasket, and a precision-machined aluminum housing.

This part is commonly compatible with TEL’s ES3D10 series etch systems, particularly models from 2014–2018. It is not compatible with the ES3D10-201275-V2 due to a revised motor interface. Using an incompatible part can lead to $5,000–$7,000 in rework costs and extended downtime.

While most specs are well-documented, some performance metrics like sealing pressure and actuator torque may vary slightly between units. Always verify the exact model and production year of your tool before purchasing. If in doubt, contact the seller for a detailed spec sheet or a compatibility check.

What to Check Before Buying a Used TEL Tokyo Electron ES3D10-201275-V1 Etch System Shutter Assembly 1.5 New Surplus in 2026

1. Verify Production Year and Cycle Count
   Units older than 2014 or with more than 12,000 RF cycles may show signs of wear. A shutter with over 15,000 cycles is a hard reject due to high failure risk. Use the tool’s logbook or maintenance records to confirm.

2. Inspect the Sealing Surface and Gasket
   Look for cracks, warping, or discoloration on the sealing surface. A damaged gasket can cause leaks, leading to $8,000–$12,000 in chamber contamination costs. Use a visual inspection and pressure test to verify integrity.

3. Test Motor and Actuator Functionality
   Run a manual actuation test and a motorized cycle test. The shutter should open and close smoothly within 3–5 seconds. Any hesitation or misalignment is a red flag.

4. Check for Corrosion or Contamination
   Look for signs of plasma residue or chemical buildup. A contaminated unit may require a full cleaning before installation, adding $1,500–$2,500 in labor costs.

5. Request a Full Refurbishment Report
   If the unit is labeled as “refurbished,” ask for a detailed refurbishment log. Units not fully disassembled and cleaned may still carry hidden defects that could lead to $6,000–$10,000 in unplanned downtime.

FAQ

Q: Can I use the TEL ES3D10-201275-V1 on a newer TEL etch system?
A: No. This part is not compatible with the ES3D10-201275-V2 or newer models due to a revised motor interface. Attempting to use it may result in $5,000–$7,000 in rework costs.

Q: Should I buy a used TEL ES3D10-201275-V1 if it has 14,000 RF cycles?
A: It depends. Units with over 15,000 cycles are a hard reject, but 14,000 cycles may still be acceptable if the part is in good condition. Always request a cycle count verification and a visual inspection.

Q: How long does a TEL ES3D10-201275-V1 last before needing replacement?
A: Typically 8–10 years or 12,000–15,000 RF cycles, depending on usage and maintenance. A well-maintained unit can last longer, but avoid using it past 15,000 cycles to prevent failure.

Q: Is it worth buying a used TEL ES3D10-201275-V1 instead of new?
A: Yes, if the unit is in good condition and under 8 years old. You can save 40–60% compared to a new OEM part. However, a failed unit can cost $10,000–$15,000 in downtime, so due diligence is essential.

Q: How does the TEL ES3D10-201275-V1 compare to the V2 version?
A: The V2 has a redesigned motor interface and improved sealing mechanism. The V1 is not interchangeable with the V2. Upgrading to V2 may cost $2,000–$3,000 in parts and labor.