Various (Entegris, SAES, ATMI)
Used Gas Purifier for Inert / Process Gases
Various (Entegris, SAES, ATMI)
Used Gas Purifier for Inert / Process Gases
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Gas Purifier for Inert / Process Gases moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Gas Purifier for Inert / Process Gases cost in 2026?
Pricing for used Used Gas Purifier for Inert / Process Gases units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (Entegris, SAES, ATMI) Gas Systems vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Gas Purifier for Inert / Process Gases from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Used Gas Purifier for Inert / Process Gases Specifications and Compatible Tools
Key specs: Flow rate 0.1–50 SLPM, pressure drop <0.5 psi, purity 99.999% (5N), voltage 12–24V DC. Compatible with:
- Lam Research Centura Cluster Tool (models 8200/8210, 2010–2015)
- Applied Materials Endura Platform (models 5500/5600, 2012–2018)
- Tokyo Electron Lambda Twin innovation (models 8200/8220, 2014–2020)
Warning: Not compatible with Axcelis 300mm Pulsar II tools using part number 789-456-2 (oxygen sensor conflict). Verify gas chemistry compatibility before installation.
What to Check Before Buying a Used Gas Purifier in 2026
- Pressure drop test: Use a digital pressure gauge; reject if >0.5 psi at rated flow.
- Flow calibration: Measure with a rotameter; deviation >5% from spec indicates clogged filters.
- Corrosion inspection: Check inlet/outlet ports for pitting (common in seawater-cooled models pre-2015).
- Certification date: Recertification after 2021 required for OSHA compliance in Class I Div 2 environments.
- Leak test: Perform helium mass spectrometry; leakage >1×10⁻⁶ std cm³/sec fails. Units with >10k operating hours need coil resistance testing (spec: 0.1–0.3 ohms).
FAQ
Q: Used vs. refurbished gas purifier—what’s the difference?
A: Used units are operational but may lack recent calibration; refurbished includes full rebuild, new filters, and 1-year warranty.
Q: How to verify compatibility with my tool?
A: Cross-reference your tool’s gas input specifications (pressure, purity, flow) with the purifier’s datasheet. Contact OEM for part-number validation.
Q: Can Entegris purifiers replace SAES models?
A: Yes, if flow and pressure specs align. SAES units handle higher particulate loads but lack Entegris’ hydrogen-specific catalysts.
Q: What’s the lifespan of a gas purifier filter?
A: 3–5 years, depending on gas purity
Recent Market Listings
Updated Sep 30No recent market activity for Used Gas Purifier for Inert / Process Gases.
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