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Various (Heraeus, Momentive, Saint-Gobain)

Used 6-Inch Quartz Tube for Semiconductor Furnace

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Various (Heraeus, Momentive, Saint-Gobain)

Used 6-Inch Quartz Tube for Semiconductor Furnace

Name: Used 6-Inch Quartz Tube for Semiconductor Furnace
Brand: Various (Heraeus, Momentive, Saint-Gobain)
Price: 1400 USD
Availability: InStock

Market Price

→ Stable

$300–$3K

Typical secondary market pricing · USD

Low $300Avg $1,400High $2,500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $300 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used 6-Inch Quartz Tube for Semiconductor Furnace cost in 2026?

A used Used 6-Inch Quartz Tube for Semiconductor Furnace from Various (Heraeus, Momentive, Saint-Gobain) typically sells for $300 – $3k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (Heraeus, Momentive, Saint-Gobain) Quartzware vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used 6-Inch Quartz Tube for Semiconductor Furnace from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used 6-Inch Quartz Tube Cost in 2026?

Used 6-inch quartz tubes (ID: 152 mm, wall thickness: 3–6 mm) typically range from $450 to $3,200 in 2026, depending on purity (99.99% vs. 99.999% SiO2) and condition. Refurbished units with recertified coatings (e.g., anti-reflective) add $200–$500. This represents 65–90% savings vs. new OEM pricing ($1,500–$10,000). Caveat: Tubes with >10 µm surface pitting or devitrification (cloudy zones) must be rejected, as they fail ASTM E1464 thermal shock tests. Always request a recent hydrofluoric acid etch report to confirm no microcracks.

6-Inch Quartz Tube Specifications and Compatible Tools

Key specs: 99.99% purity SiO2, max temp 1,400°C, OD 160–170 mm, fused silica construction. Compatible with:

Lam Research Centura P5000 (2012–2018)
Applied Materials Producer 4520 (2010–2016)
Hitachi HiCDA-600 (2014–2020)
Exclusion: Avoid part #QZ-6-2A from Saint-Gobain for Tokyo Electron LEGEND P8i systems (2019+); incompatible wall thickness causes gas leakage. Verify O-ring groove dimensions (ID 152.4 ±0.1 mm) against tool schematics.

What to Check Before Buying a Used 6-Inch Quartz Tube in 2026

Surface integrity: Use a 10x magnifier to inspect for cracks >50 µm or pits >3 per 10 cm². Reject if present.
Wall thickness: Measure at 5 axial points with a digital caliper; deviation >10% from nominal (e.g., 3.0 mm to 2.7 mm) indicates thermal stress damage.
Contamination: Run an ICP-MS test for heavy metals (e.g., Fe, Al); concentrations >10 ppb invalidate purity claims.
Thermal history: Request pyrometer logs. Tubes with >5,000 thermal cycles (heating/cooling) show accelerated devitrification.
Leak test: Perform a helium mass spectrometer leak check at 1x10⁻⁹ mbar·l/s max.

FAQ

Q: What’s the max temp rating for a 6-inch quartz tube?
A: 1,400°C continuous, but derate to 1,300°C for >24h cycles to prevent sagging.

Q: Used vs. new quartz tube: which is better for CVD?
A: New tubes offer higher purity, but used tubes with <100 thermal cycles and recent etch reports perform equivalently for standard oxidation.

Q: Can Heraeus quartz tubes replace Saint-Gobain in Lam Research tools?
A: Yes, if dimensions match (ID 152.4 mm, OD 165 mm). Cross-reference part