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Various (Heraeus, Momentive, Saint-Gobain)

Used 6-Inch Quartz Tube for Semiconductor Furnace

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Various (Heraeus, Momentive, Saint-Gobain)

Used 6-Inch Quartz Tube for Semiconductor Furnace

Market Price

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✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used 6-Inch Quartz Tube for Semiconductor Furnace moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used Used 6-Inch Quartz Tube for Semiconductor Furnace cost in 2026?

Pricing for used Used 6-Inch Quartz Tube for Semiconductor Furnace units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (Heraeus, Momentive, Saint-Gobain) Quartzware vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used 6-Inch Quartz Tube for Semiconductor Furnace from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

6-Inch Quartz Tube Specifications and Compatible Tools

Key specs: 99.99% purity SiO2, max temp 1,400°C, OD 160–170 mm, fused silica construction. Compatible with:

  • Lam Research Centura P5000 (2012–2018)
  • Applied Materials Producer 4520 (2010–2016)
  • Hitachi HiCDA-600 (2014–2020)
    Exclusion: Avoid part #QZ-6-2A from Saint-Gobain for Tokyo Electron LEGEND P8i systems (2019+); incompatible wall thickness causes gas leakage. Verify O-ring groove dimensions (ID 152.4 ±0.1 mm) against tool schematics.

What to Check Before Buying a Used 6-Inch Quartz Tube in 2026

  1. Surface integrity: Use a 10x magnifier to inspect for cracks >50 µm or pits >3 per 10 cm². Reject if present.
  2. Wall thickness: Measure at 5 axial points with a digital caliper; deviation >10% from nominal (e.g., 3.0 mm to 2.7 mm) indicates thermal stress damage.
  3. Contamination: Run an ICP-MS test for heavy metals (e.g., Fe, Al); concentrations >10 ppb invalidate purity claims.
  4. Thermal history: Request pyrometer logs. Tubes with >5,000 thermal cycles (heating/cooling) show accelerated devitrification.
  5. Leak test: Perform a helium mass spectrometer leak check at 1x10⁻⁹ mbar·l/s max.

FAQ

Q: What’s the max temp rating for a 6-inch quartz tube?
A: 1,400°C continuous, but derate to 1,300°C for >24h cycles to prevent sagging.

Q: Used vs. new quartz tube: which is better for CVD?
A: New tubes offer higher purity, but used tubes with <100 thermal cycles and recent etch reports perform equivalently for standard oxidation.

Q: Can Heraeus quartz tubes replace Saint-Gobain in Lam Research tools?
A: Yes, if dimensions match (ID 152.4 mm, OD 165 mm). Cross-reference part

Recent Market Listings

Updated Sep 30

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Related Parts

Quick Info

ConditionUsed
CategoryQuartzware

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