Various (VAT, Nor-Cal, MDC)
Used Slit Valve for Semiconductor Load Lock
Various (VAT, Nor-Cal, MDC)
Used Slit Valve for Semiconductor Load Lock
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Slit Valve for Semiconductor Load Lock moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Slit Valve for Semiconductor Load Lock cost in 2026?
Pricing for used Used Slit Valve for Semiconductor Load Lock units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (VAT, Nor-Cal, MDC) Vacuum Components vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Slit Valve for Semiconductor Load Lock from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Slit Valve Specifications and Compatible Tools
Key specs: 1×10⁻⁶ Torr vacuum rating, 24V DC actuation, 100–500 SCCM flow rate, and 2–5 second open/close cycle time. Compatible with:
- VAT V-3000 (2010–2015 production)
- Nor-Cal NC-850 (2012–2018)
- MDC MDX-5 (2008–2014)
Exclusion: Not compatible with Lam Research Centura R4000 (part #LR-CLV-4K) due to mismatched actuation port dimensions. Cross-check tool manuals for flange size (CF-40/ISO-KF) and pressure sensor integration.
What to Check Before Buying a Used Slit Valve in 2026
- Diaphragm thickness: Measure with a micrometer; reject if <0.3mm (original spec: 0.4–0.5mm).
- Leak rate: Perform helium mass spectrometer test; must be <1×10⁻⁸ std cm³/sec.
- Actuator response: Use an oscilloscope to confirm 24V DC trigger time <2.5 seconds.
- Service history: Units with no seal replacement in the last 5 years may require overhaul.
- Corrosion: Inspect internal surfaces for pitting; reject if >3 pitting sites per 10cm².
FAQ
Q: Is a used VAT slit valve interchangeable with Nor-Cal?
A: Yes, if both have CF-40 flanges and 24V DC actuation. Verify part # on the tool’s I/O board.
Recent Market Listings
Updated Sep 30No recent market activity for Used Slit Valve for Semiconductor Load Lock.
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Quick Info
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