Various (VAT, Nor-Cal, MDC)
Used Slit Valve for Semiconductor Load Lock
Various (VAT, Nor-Cal, MDC)
Used Slit Valve for Semiconductor Load Lock
Market Price
→ StableFrom $2K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Slit Valve for Semiconductor Load Lock
Price history and market activity data is being compiled.
How much does a used Used Slit Valve for Semiconductor Load Lock cost in 2026?
A used Used Slit Valve for Semiconductor Load Lock from Various (VAT, Nor-Cal, MDC) typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Various (VAT, Nor-Cal, MDC) Vacuum Components vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Slit Valve for Semiconductor Load Lock from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does a Used Slit Valve for Semiconductor Load Lock Cost in 2026?
Used models from VAT, Nor-Cal, or MDC typically range from $1,200 to $3,500 in 2026, depending on age and condition. Refurbished variants (with OEM-certified seals and actuators) cost $2,500–$6,000, saving 40–60% compared to new units ($4,500–$10,000). Units older than 12 years (pre-2014) may require additional seal replacements, adding $300–$800 in labor. Always verify vacuum integrity ratings before purchase.
Slit Valve Specifications and Compatible Tools
Key specs: 1×10⁻⁶ Torr vacuum rating, 24V DC actuation, 100–500 SCCM flow rate, and 2–5 second open/close cycle time. Compatible with:
- VAT V-3000 (2010–2015 production)
- Nor-Cal NC-850 (2012–2018)
- MDC MDX-5 (2008–2014)
Exclusion: Not compatible with Lam Research Centura R4000 (part #LR-CLV-4K) due to mismatched actuation port dimensions. Cross-check tool manuals for flange size (CF-40/ISO-KF) and pressure sensor integration.
What to Check Before Buying a Used Slit Valve in 2026
- Diaphragm thickness: Measure with a micrometer; reject if <0.3mm (original spec: 0.4–0.5mm).
- Leak rate: Perform helium mass spectrometer test; must be <1×10⁻⁸ std cm³/sec.
- Actuator response: Use an oscilloscope to confirm 24V DC trigger time <2.5 seconds.
- Service history: Units with no seal replacement in the last 5 years may require overhaul.
- Corrosion: Inspect internal surfaces for pitting; reject if >3 pitting sites per 10cm².
FAQ
Q: Is a used VAT slit valve interchangeable with Nor-Cal?
A: Yes, if both have CF-40 flanges and 24V DC actuation. Verify part # on the tool’s I/O board.
**Q: Used vs. refurbished slit
Recent Market Listings
Updated May 19$425
As-is$1,850
Used$3,650
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $425 | As-is | May 12, 2026 |
| Ask | $1,850 | Used | May 5, 2026 |
| Ask | $3,650 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $2K – $2K
Response within 4 hours. Export compliance handled.
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