Used Vacuum Gauge Controller

Name: Used Vacuum Gauge Controller
Brand: MKS/Granville-Phillips

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Vacuum Gauge Controller moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Vacuum Gauge Controller cost in 2026?

Pricing for used Used Vacuum Gauge Controller units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MKS/Granville-Phillips Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Vacuum Gauge Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Vacuum Gauge Controller Specifications and Compatible Tools

Key specs: 0–10 Torr measurement range, 0.1% full-scale accuracy, 24V DC or 120V AC power, 4–20mA/Hart output, and RS-485 digital interface. Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Endura (2000–2007)
ASMI Fusion (2002–2009)
Exclusion: Varian 3100 series (part #31-00-12A)—uses proprietary analog protocols incompatible with MKS controllers. Confirm tool’s gauge input type (thermocouple/Pirani) before purchase.

What to Check Before Buying a Used Vacuum Gauge Controller in 2026

Physical Inspection: Reject units with corroded connectors or cracked enclosures—inspect with 10x magnifier.
Calibration Test: Use a Fluke 729 multimeter to verify 4–20mA output stability; deviation >0.5mA invalidates accuracy.
Power Draw Check: Measure with a Siglent SPD3303X power supply; units drawing >15W at 24V DC may have failing regulators.
Firmware Age: Controllers with firmware pre-2018 lack modern PID compensation—check via front-panel menu.
Lifecycle Metrics: Reject units with >10,000 operational hours without rebuild—log hours via RS-485 query.

FAQ

Q: Does the MKS 631B work with my 2003 Lam P5000?
A: Yes, but only if your P5000 uses a Pirani gauge (check tool’s spec sheet for gauge type).

Q: Used vs. refurbished—what’s the real difference?
A: Used units may lack calibration; refurbished includes full diagnostics, replacement of capacitors >