Used Vacuum Gauge Controller

Name: Used Vacuum Gauge Controller
Brand: MKS/Granville-Phillips
Price: 950 USD
Availability: InStock

Market Price

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1 active listing

From $950

Typical secondary market pricing · USD

Low $950Avg $950High $950

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $950 – $950

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Vacuum Gauge Controller cost in 2026?

A used Used Vacuum Gauge Controller from MKS/Granville-Phillips typically sells for $950 – $950 on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used MKS/Granville-Phillips Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Vacuum Gauge Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Vacuum Gauge Controller Cost in 2026?

Used units (MKS model 631B, 260A, or 261A) range from $500–$2,500 in 2026, depending on age and calibration history. Refurbished variants (certified NIST-traceable) cost $1,200–$3,000, saving 40–60% vs. new ($2,500–$5,000 MSRP). Controllers older than 8 years without recent recalibration (per ISO 17025) may add $300–$500 for recertification. Always verify if the unit includes original calibration certificates—absence can reduce value by 15–20%.

Vacuum Gauge Controller Specifications and Compatible Tools

Key specs: 0–10 Torr measurement range, 0.1% full-scale accuracy, 24V DC or 120V AC power, 4–20mA/Hart output, and RS-485 digital interface. Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Endura (2000–2007)
ASMI Fusion (2002–2009)
Exclusion: Varian 3100 series (part #31-00-12A)—uses proprietary analog protocols incompatible with MKS controllers. Confirm tool’s gauge input type (thermocouple/Pirani) before purchase.

What to Check Before Buying a Used Vacuum Gauge Controller in 2026

Physical Inspection: Reject units with corroded connectors or cracked enclosures—inspect with 10x magnifier.
Calibration Test: Use a Fluke 729 multimeter to verify 4–20mA output stability; deviation >0.5mA invalidates accuracy.
Power Draw Check: Measure with a Siglent SPD3303X power supply; units drawing >15W at 24V DC may have failing regulators.
Firmware Age: Controllers with firmware pre-2018 lack modern PID compensation—check via front-panel menu.
Lifecycle Metrics: Reject units with >10,000 operational hours without rebuild—log hours via RS-485 query.

FAQ

Q: Does the MKS 631B work with my 2003 Lam P5000?
A: Yes, but only if your P5000 uses a Pirani gauge (check tool’s spec sheet for gauge type).

Q: Used vs. refurbished—what’s the real difference?
A: Used units may lack calibration; refurbished includes full diagnostics, replacement of capacitors >