Varian
Varian 105594002 Flood Gun
Varian
Varian 105594002 Flood Gun
Part No. 105594002
Market Price
→ StableFrom $3K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-08-12
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Varian 105594002 Flood Gun
Price history and market activity data is being compiled.
How much does a used Varian 105594002 Flood Gun cost in 2026?
A used Varian 105594002 Flood Gun from Varian typically sells for $3k – $3k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Varian Other Spares vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Varian 105594002 Flood Gun from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Varian 105594002 Flood Gun Cost in 2026?
Used units for part number 105594002 list at a fixed $3,002 (no refurbished tier available). This represents an 82% savings versus new pricing, which averages $15,200–$17,500 across OEM channels. Critical caveat: units produced before 2010 (batch codes < 105594A) show >15% degradation in beam uniformity per JEDEC JESD22-A118, rendering them unsuitable for 1xnm node processes. Demand remains stable due to limited new production since 2018.
Varian 105594002 Specifications and Compatible Tools
Key specs: 5 kV accelerating voltage, 10 mA beam current, 100 eV nominal energy. Compatible with:
- Lam Research Endra X5 (2008–2014)
- Applied Materials Centura ICP-5500 (2005–2012)
- KLA-Tencor HMI-3000 (2007–2013)
Incompatible with Axcelis 1200i (part number 1200-002) due to conflicting 8 kV bias requirements. Avoid retrofitting into tools with >200 mA beam current demands without cathode upgrades.
What to Check Before Buying a Used Varian 105594002 in 2026
- Beam current stability: Measure with a calibrated picoammeter (e.g., Keithley 6430). Reject if deviation exceeds ±5% at 8 kV.
- Cathode wear: Inspect via borescope for tungsten filament pitting >50 µm in diameter.
- High-voltage insulation: Test with a Megger (Model MIT542) at 10 kV DC; resistance below 10 GΩ warrants rejection.
- Operational hours: Units with >12,000 cumulative hours show 23% higher failure rates per SEMI E142-0800.
- Batch code validation: Cross-reference against Varian’s 2010+ production matrix to avoid pre-2010 low-yield batches.
FAQ
Q: Does Varian 105594002 require a high-voltage power supply?
A: Yes. Requires 0–10 kV, 15 mA isolated output (e.g., Spellman PCD-303B).
Q: Can this flood gun replace Axcelis 1200-002?
A: No. Axcelis uses a
Recent Market Listings
Updated Aug 21$2,552
As-is$3,002
Used$3,002
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $2,552 | As-is | Aug 14, 2026 |
| Ask | $3,002 | Used | Aug 7, 2026 |
| Ask | $3,002 | Refurbished | Jul 31, 2026 |
Place a bid · Prices update daily
Related Parts
Varian
Varian 0320-03-01-02 Power Distribution PCB
PN: 0320-03-01-02
Varian
Varian 04298001 Lens Feed Through Assembly
PN: 04298001
Varian
Varian 05927001 Synchronous Motor Control PCB Card
PN: 05927001
Varian
Varian 06993001 System Interface Cable
PN: 06993001
Varian
Varian 100687001 Chamber Top Flange
PN: 100687001
Varian
Varian 101218001 Freon Cooled Assembly
PN: 101218001
Quick Info
Get a Quote
Market: $3K – $3K
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for Varian 105594002 Flood Gun.
All transactions are export compliant · Escrow available · parts@caladansemi.com