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Varian

Varian 105594002 Flood Gun

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Varian

Varian 105594002 Flood Gun

Part No. 105594002

Market Price

→ Stable
1 active listing

From $3K

Typical secondary market pricing · USD

Low $3,002Avg $3,002High $3,002

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-12

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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How much does a used Varian 105594002 Flood Gun cost in 2026?

A used Varian 105594002 Flood Gun from Varian typically sells for $3k – $3k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Varian Other Spares vs. buying new: is it worth it in 2026?

Used (2026)
Save 40–70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Varian 105594002 Flood Gun from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Varian 105594002 Flood Gun Cost in 2026?

Used units for part number 105594002 list at a fixed $3,002 (no refurbished tier available). This represents an 82% savings versus new pricing, which averages $15,200–$17,500 across OEM channels. Critical caveat: units produced before 2010 (batch codes < 105594A) show >15% degradation in beam uniformity per JEDEC JESD22-A118, rendering them unsuitable for 1xnm node processes. Demand remains stable due to limited new production since 2018.

Varian 105594002 Specifications and Compatible Tools

Key specs: 5 kV accelerating voltage, 10 mA beam current, 100 eV nominal energy. Compatible with:

  • Lam Research Endra X5 (2008–2014)
  • Applied Materials Centura ICP-5500 (2005–2012)
  • KLA-Tencor HMI-3000 (2007–2013)
    Incompatible with Axcelis 1200i (part number 1200-002) due to conflicting 8 kV bias requirements. Avoid retrofitting into tools with >200 mA beam current demands without cathode upgrades.

What to Check Before Buying a Used Varian 105594002 in 2026

  1. Beam current stability: Measure with a calibrated picoammeter (e.g., Keithley 6430). Reject if deviation exceeds ±5% at 8 kV.
  2. Cathode wear: Inspect via borescope for tungsten filament pitting >50 µm in diameter.
  3. High-voltage insulation: Test with a Megger (Model MIT542) at 10 kV DC; resistance below 10 GΩ warrants rejection.
  4. Operational hours: Units with >12,000 cumulative hours show 23% higher failure rates per SEMI E142-0800.
  5. Batch code validation: Cross-reference against Varian’s 2010+ production matrix to avoid pre-2010 low-yield batches.

FAQ

Q: Does Varian 105594002 require a high-voltage power supply?
A: Yes. Requires 0–10 kV, 15 mA isolated output (e.g., Spellman PCD-303B).

Q: Can this flood gun replace Axcelis 1200-002?
A: No. Axcelis uses a

Recent Market Listings

Updated Aug 21
AskAug 14, 2026

$2,552

As-is
AskAug 7, 2026

$3,002

Used
AskJul 31, 2026

$3,002

Refurbished

Place a bid · Prices update daily

Related Parts

Quick Info

ConditionUsed
CategoryOther Spares
Lead Time2-4 weeks after sourcing

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Market: $3K – $3K

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