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Varian

Varian H5173002 Graphite Exit Shield

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Varian

Varian H5173002 Graphite Exit Shield

Part No. H5173002

Market Price

→ Stable

2 active listings

$1K

One observed secondary-market listing · USD

Low $1,009Avg $1,009High $1,009

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-12

Request Quote · $1K (one observed listing)

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Varian H5173002 Graphite Exit Shield

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used Varian H5173002 Graphite Exit Shield cost in 2026?

One observed secondary-market listing for a used Varian H5173002 Graphite Exit Shield from Varian: $1k (2026). A single observation is not a market range. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Varian Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Varian H5173002 Graphite Exit Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

The H5173002 is a graphite exit shield used in Varian Semiconductor Equipment (VSEA) ion implant systems. Exit shields are consumable process kit components positioned near the beam line exit to intercept stray ions and protect surrounding chamber hardware. Graphite is a standard material for this application due to its tolerance of ion bombardment.

Observed Market Pricing

We have 1 observed listing for H5173002 at $1,009.

Condition	Observed price	Source	Observed
Used	$1,009	Market survey	Aug 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for H5173002: used. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

Inspect graphite shields for erosion, cracking, and chipping before installation, as ion bombardment gradually thins the material and compromised shields can shed particles into the process chamber. Confirm the lot quantity meets your run schedule, since graphite exit shields are consumed at a rate tied to beam current and implant hours.

Frequently Asked Questions

Q: How much does Varian H5173002 cost? A: We've observed H5173002 listed at $1,009. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Q: Which tools does H5173002 fit? A: The description identifies this part as a VSEA (Varian Semiconductor Equipment) component, but does not specify a particular implanter model. Compatibility should be confirmed by matching part number H5173002 against your tool's bill of materials; we verify fit before quoting.

Q: What condition options are available for H5173002? A: We've seen this P/N offered as: used. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for H5173002? A: Use the quote form on this page — the part number H5173002 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30

AskSep 23, 2026

$858

As-is

AskSep 16, 2026

$1,009

Used

AskSep 9, 2026

$1,009

Refurbished

Type	Price	Condition	Date
Ask	$858	As-is	Sep 23, 2026
Ask	$1,009	Used	Sep 16, 2026
Ask	$1,009	Refurbished	Sep 9, 2026

Place a bid · Prices update daily

Frequently Asked Questions

How much does Varian H5173002 cost?

We've observed H5173002 listed at $1,009. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Which tools does H5173002 fit?

The description identifies this part as a VSEA (Varian Semiconductor Equipment) component, but does not specify a particular implanter model. Compatibility should be confirmed by matching part number H5173002 against your tool's bill of materials; we verify fit before quoting.

What condition options are available for H5173002?

We've seen this P/N offered as: used. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for H5173002?

Use the quote form on this page — the part number H5173002 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.