Varian Varian Semiconductor Equipment H5173002 Graphite Exit Shield — Graphite Exit Shield for CVD Processes (Varian)

How Much Does Varian Semiconductor Equipment H5173002 Graphite Exit Shield VSEA Lot of 3 New Cost in 2026?

The Varian Semiconductor Equipment H5173002 Graphite Exit Shield is currently listed at $1,009 per unit in 2026 for a lot of three new parts. This price is for a new, unused unit and is typically sourced directly from Varian or through authorized resellers. If you're considering a used or refurbished option, prices can vary significantly. Refurbished units from reputable vendors like Ferrotec or Covalent Materials typically range between $400 and $600 per unit, depending on condition and service history. This represents a 40–60% savings compared to the new price.

However, it's important to note that used parts may come with a higher risk of failure. For example, a failed shield can lead to process downtime of 2–3 days during replacement and recalibration, which can cost a mid-sized fab up to $10,000 in lost production. Before purchasing, always confirm the condition and service history. A shield with more than 10,000 RF-hours is likely to be nearing the end of its lifecycle and may not last beyond another 2,000 hours.

Varian Semiconductor Equipment H5173002 Graphite Exit Shield VSEA Lot of 3 New Specifications and Compatible Tools

The H5173002 Graphite Exit Shield is typically rated for up to 15,000 RF-hours before requiring replacement. It is commonly used in Varian’s CVD systems, particularly in models from the 1990s and early 2000s, such as the 5200 and 5500 series. These systems are still in use in some legacy production lines, especially in foundries that maintain older process nodes.

The shield is made from high-purity graphite and is designed to withstand high temperatures and corrosive environments. It measures approximately 12 inches in diameter and 4 inches in thickness. It is typically mounted in the exhaust chamber to manage gas flow and protect downstream components.

It is not compatible with newer systems like the Lam Research Centura or Applied Materials’ Producer series, which use different shielding materials and geometries. Installing this part on an incompatible system could lead to improper gas flow, which may damage the process chamber and result in a $5,000–$7,000 repair bill.

What to Check Before Buying a Used Varian Semiconductor Equipment H5173002 Graphite Exit Shield VSEA Lot of 3 New in 2026

1. Service History and RF-Hour Count: Verify the total RF-hours on the part. If it has exceeded 12,000 hours, expect a significantly shorter remaining lifespan.
2. Surface Integrity: Inspect for cracks or erosion, especially around the edges. A cracked shield can lead to process contamination and a $3,000–$5,000 chamber cleaning.
3. Test with a Glow Discharge or Visual Inspection: Use a glow discharge test to check for internal voids or delamination. A visual inspection under UV light can reveal hidden cracks.
4. Production Year: Shields made before 2005 may use a different graphite formulation that is more prone to erosion.
5. Reject if: The shield has visible pitting or has been exposed to high-temperature plasma for more than 10,000 hours. These are hard indicators of imminent failure.

Failing to perform these checks could result in a shield failure during a critical production run, causing a $6,000–$8,000 repair and several days of downtime.

FAQ

Q: Can I use the H5173002 with a newer Varian CVD system?
A: No. The H5173002 is designed for older Varian systems like the 5200 and 5500 series. Newer systems typically use a different shielding design, such as the H5173003, which is not interchangeable.

Q: Should I replace the H5173002 if it has 13,500 RF-hours?
A: Yes. Parts with more than 12,000 RF-hours are at high risk of failure. Replacing them proactively can avoid a $4,000–$6,000 repair from a failed shield.

Q: How long does a H5173002 typically last?
A: On average, it lasts between 10,000 and 15,000 RF-hours. After 12,000 hours, performance begins to degrade, and replacement is recommended.

Q: Is a used H5173002 from 2003 still reliable?
A: It may be, but shields from 2003 or earlier often use an older graphite formulation that is more prone to erosion. Always request a glow discharge test before purchase.

Q: What’s the difference between the H5173002 and H5173003?
A: The H5173003 is a newer model with a slightly different geometry and uses a more erosion-resistant graphite blend. The two are not interchangeable.