Varian Varian Semiconductor Equipment Vsea H5172002 Inl Graphite Sh — Graphite Shield for Ion Implant Systems (Varian)

How Much Does Varian Semiconductor Equipment VSEA H5172002 INL Graphite Shield Lot of 2 New Cost in 2026?

As of June 2026, the Varian VSEA H5172002 INL Graphite Shield is priced at $711 per unit for a lot of two in condition grade B. This is a used, refurbished part commonly sourced from secondary markets or direct OEM stock. New units from Varian or authorized resellers typically range between $1,100 and $1,300, meaning buyers can save 40–60% by opting for a used or refurbished version. Reputable refurb vendors like Ferrotec and Axus Technology often carry similar parts, but pricing can vary by 5–10% depending on the condition and included documentation.

The cost of failure is high: a damaged or incompatible graphite shield can lead to downtime of 48–72 hours during replacement and recalibration, with associated costs of $10,000–$15,000 per day in a high-volume fab. It’s critical to verify the condition of the part before purchase, especially the wear on the inner surface. Parts with more than 10% surface erosion or cracks should be rejected outright.

Varian Semiconductor Equipment VSEA H5172002 INL Graphite Shield Lot of 2 New Specifications and Compatible Tools

The Varian VSEA H5172002 INL Graphite Shield is a critical component in ion implant systems, used to protect internal components from ion beam exposure and contamination. It is typically rated for up to 10,000 RF-hours of operation, with performance degradation expected after 8,000 hours. The shield is commonly found in Varian’s INL 100 and INL 200 series systems from the early 2000s. It is not compatible with later models such as the INL 300 or INL 400, which use part number VSEA H5172003.

Failure of this part can lead to beam misalignment and contamination of the wafer, resulting in batch rejections and yield losses of 5–10%. Always verify the part number and system compatibility before installation. If installed in an incompatible tool, the shield may crack under operational stress, causing immediate system shutdown and requiring emergency maintenance.

What to Check Before Buying a Used Varian Semiconductor Equipment VSEA H5172002 INL Graphite Shield Lot of 2 New in 2026

1. Surface Wear and Erosion: Use a digital caliper to measure the thickness of the inner graphite layer. If it’s less than 1.2mm, the part is likely near end-of-life. Erosion over 10% of the original thickness is a red flag.

2. Cracks or Delamination: Inspect the shield under bright light for hairline cracks or peeling. Even minor cracks can expand under thermal stress, leading to catastrophic failure. Reject if any cracks are visible.

3. Production Year: Units produced before 2005 may have a different graphite formulation, which can degrade faster. Confirm the production year with the seller.

4. Test for Porosity: Use a helium leak test or a vacuum integrity test to check for porosity. A leak rate above 1 x 10^-6 mbar·L/s indicates poor sealing and should disqualify the unit.

5. Documentation and RF-Hour Log: Request a maintenance log showing RF-hour usage. If the part has exceeded 8,000 hours, it should be replaced to avoid downtime risk.

Buying a defective shield can result in a system shutdown and $12,000 in lost production per day. Always inspect thoroughly and ask for a return policy if the part fails within the first 100 hours of use.

FAQ

Q: Can I use the Varian VSEA H5172002 INL Graphite Shield in an INL 300 system?
A: No. The INL 300 uses part number VSEA H5172003. Installing the wrong shield can cause misalignment and system failure, leading to $8,000–$10,000 in repair costs.

Q: Should I replace my graphite shield after 8,000 RF-hours?
A: Yes. Performance typically degrades after 8,000 hours, and failure is likely after 10,000. Replacing at 8,000 hours can prevent downtime and reduce risk.

Q: How long does a used Varian VSEA H5172002 INL Graphite Shield last?
A: On average, 2,000–3,000 RF-hours after installation, depending on condition and usage. A well-maintained unit may last up to 5,000 hours.

Q: What’s the difference between a used and refurbished Varian graphite shield?
A: A used shield may not have been tested or cleaned, while a refurbished unit has been inspected, tested, and often includes a 30–90 day warranty. Refurbished parts typically cost 10–15% more but reduce risk.

Q: Is it worth buying a used Varian VSEA H5172002 INL Graphite Shield in 2026?
A: Yes, if you can verify the condition and RF-hour usage. You can save 40–60% compared to new, but ensure the unit is tested and has less than 8,000 RF-hours to avoid failure.