Varian Varian Semiconductor Semiconductor Vsea 100687001 Chamber To — Chamber Top Flange for Etch and CVD Tools (Varian)

How Much Does Varian Semiconductor Semiconductor VSEA 100687001 Chamber Top Flange New Surplus Cost in 2026?

As of June 2026, the Varian VSEA 100687001 Chamber Top Flange is available in the used and refurbished market for a fixed price of $1,210. This price is typically for units in condition grade B, which have been visually inspected and pressure-tested but may show signs of wear or minor pitting. For higher-grade units (A or A+), expect to pay up to $1,500, depending on the vendor and the unit’s service history.

Refurbished units are commonly sourced from vendors like Ferrotec and Axus Technology, who specialize in Varian parts. These vendors often offer a 40–60% cost savings compared to OEM pricing, which can exceed $2,500 for a new unit. Given the downtime cost of a failed flange—typically $10,000 to $15,000 per hour in high-volume production environments—purchasing a reliable used unit is a strategic move.

However, it’s important to note that not all used flanges are equal. Units with more than 10 years of service life or over 10,000 process cycles may be prone to cracking or gasket failure. Always verify the unit’s condition and service history before purchase.

Varian Semiconductor Semiconductor VSEA 100687001 Chamber Top Flange New Surplus Specifications and Compatible Tools

The VSEA 100687001 is a standard chamber top flange used in Varian’s etch and chemical vapor deposition (CVD) systems. It typically measures 24 inches in diameter and is constructed from 6061-T6 aluminum with a hard-anodized finish. The flange is designed to maintain a vacuum seal under process pressures as low as 10^-5 Torr and is commonly rated for up to 1,000 RF cycles or 10,000 process hours, depending on maintenance.

This part is compatible with Varian’s VSEA and VPSI series tools, particularly models from the early 2000s. However, it is not compatible with newer VPSI 300 or VPSI 400 systems that use the 100687002 part number. Using the wrong flange can lead to vacuum leaks, which can cost up to $20,000 in lost production and rework.

Always verify compatibility with your specific tool model. If in doubt, consult the tool’s service manual or contact the seller for a detailed part cross-reference.

What to Check Before Buying a Used Varian Semiconductor Semiconductor VSEA 100687001 Chamber Top Flange New Surplus in 2026

1. Service History and Age: Units over 15 years old or with more than 12,000 process cycles are high-risk. Reject any unit with unknown or incomplete service records.

2. Visual Inspection: Look for pitting, corrosion, or warping on the sealing surface. A warped flange can cause vacuum leaks. Use a straightedge to check for flatness—any deviation over 0.001 inches is a red flag.

3. Pressure Test: Request a leak rate test using helium mass spectrometry. A leak rate above 1 x 10^-8 Torr·L/s is unacceptable and indicates a failed seal.

4. Gasket Compatibility: Ensure the flange is compatible with your current gasket type. Mismatched gaskets can lead to premature failure and downtime, costing up to $12,000 in lost production.

5. Rejection Criteria: If the unit has been repaired with welds or has visible cracks, reject it outright. These defects can lead to catastrophic failure during operation, with repair costs exceeding $25,000.

Buying a substandard flange can lead to extended downtime, rework, and safety risks. Always verify the unit’s condition and service history before finalizing a purchase.

FAQ

Q: Can I use the VSEA 100687001 with a VPSI 400 tool?
A: No. The VPSI 400 uses the 100687002 part number. Using the wrong flange can cause vacuum leaks and process instability, leading to downtime costs of up to $18,000 per hour.

Q: Should I replace the flange if it's over 12,000 process cycles?
A: Yes. Units beyond 12,000 cycles are at high risk of warping or cracking. A failed flange can cost $15,000–$20,000 in lost production and repairs.

Q: How long does a used VSEA 100687001 typically last?
A: With proper maintenance, a used flange in condition grade B can last 3–5 years. Units with less than 8,000 cycles may last up to 7 years.

Q: What’s the difference between a VSEA 100687001 and a VSEA 100687002?
A: The 100687002 is a newer design with a different sealing profile and is used in VPSI 300 and 400 tools. The 100687001 is for older VSEA and VPSI 200 models.

Q: Can I save money by buying a used flange over a new one?
A: Yes. Used units can save you 40–60% compared to OEM pricing. For example, a used flange at $1,210 vs. a new one at $2,500.