Varian Varian Semiconductor Semiconductor Vsea 105528005 125Mm Cnrc — CNRCUP Cover for VSEA Systems (Varian)

How Much Does Varian Semiconductor Semiconductor VSEA 105528005 125mm CNRCUP Cover New Surplus Cost in 2026?

As of June 2026, the Varian Semiconductor VSEA 105528005 125mm CNRCUP Cover New Surplus is priced at $810 for a single unit in condition grade B. This price is based on surplus stock and typically represents a 40–60% discount compared to OEM new pricing, which can exceed $1,300–$1,500 depending on the tool model and configuration.

Refurbished units from vendors like Covalent Materials or Axus Technology may carry a slightly higher price due to rework and testing, but they often come with warranties and performance guarantees. These vendors typically charge between $850–$900 for a B-grade unit, with a lead time of 2–4 weeks after sourcing.

The cost of failure for an improperly sourced or damaged CNRCUP cover can be significant. A failed cover can lead to vacuum leaks, which may require a full chamber evacuation and inspection, costing $5,000–$10,000 in downtime and repair labor. Additionally, if the cover is not properly sealed, it can cause contamination of the process chamber, leading to wafer scrap and reduced yield.

It’s important to note that the condition grade B indicates the unit is functional but may show signs of wear, such as minor scratches or oxidation. Always verify the unit’s production year and test results before purchase to avoid unexpected failures.

Varian Semiconductor Semiconductor VSEA 105528005 125mm CNRCUP Cover New Surplus Specifications and Compatible Tools

The Varian Semiconductor VSEA 105528005 125mm CNRCUP Cover is a vacuum chamber cover designed for use in VSEA (Vacuum Seal and Evacuation) systems. It is typically constructed from stainless steel and features a 125mm diameter port with a CNRCUP (Ceramic Non-Reactive Cover Unit Port) interface. The cover is commonly used in deposition and etch tools from the mid-2000s, including the Varian Centura and Exelan platforms.

This part is typically rated for up to 10,000 RF cycles and is designed to maintain a vacuum integrity of 10^-7 Torr. It is compatible with VSEA systems manufactured between 2003 and 2012. However, it is not compatible with newer CNRCUP variants such as the 105528006, which uses a different sealing mechanism.

Failure of this cover can lead to catastrophic vacuum loss, which may result in chamber contamination and require a full system shutdown. In one documented case, a failed CNRCUP cover led to a 48-hour production halt and $8,000 in repair costs.

What to Check Before Buying a Used Varian Semiconductor Semiconductor VSEA 105528005 125mm CNRCUP Cover New Surplus in 2026

1. Verify the Production Year: Units produced before 2008 may have thinner sealing gaskets, which can degrade faster. Look for a production date stamp or serial number on the back of the cover.

2. Check for Sealing Integrity: Use a helium leak test to confirm the unit maintains a vacuum of at least 10^-7 Torr. A leak rate above 10^-5 Torr is a hard reject.

3. Inspect for Corrosion or Oxidation: Look for pitting or rust on the sealing surface. Any visible corrosion should be rejected, as it can compromise the vacuum seal and lead to contamination.

4. Confirm Port Compatibility: Ensure the CNRCUP port matches the tool’s specifications. A mismatch in port threading or diameter can prevent installation and lead to costly delays.

5. Request Test Reports: Ask the seller for a recent test report from a certified refurbisher. Units without documentation should be approached with caution, as they may not meet OEM performance standards.

Buying a faulty CNRCUP cover can result in a $7,000–$12,000 repair bill due to vacuum failure and chamber contamination. Always source from a trusted vendor and confirm all specs before installation.

FAQ

Q: Can I use a 105528006 CNRCUP cover in place of the 105528005?
A: No. The 105528006 uses a different sealing mechanism and is not compatible with the 105528005 port. Attempting to use it can lead to a vacuum leak and a $6,000–$9,000 repair.

Q: Should I buy a used CNRCUP cover if it’s over 15 years old?
A: Not recommended. Covers over 15 years old may have degraded gaskets and are more likely to fail under vacuum. A 2010–2014 production date is ideal for long-term reliability.

Q: How long does a CNRCUP cover typically last?
A: Typically 8,000–10,000 RF cycles. Beyond that, the sealing surface may begin to degrade, increasing the risk of vacuum failure and downtime.

Q: What’s the difference between a new and a used CNRCUP cover?
A: New covers come with full OEM warranties and are guaranteed to meet 10^-7 Torr vacuum standards. Used covers may vary in performance and should be tested before installation.

Q: Is it worth buying a CNRCUP cover from a third-party vendor?
A: Yes, if the vendor provides a full test report and a 12-month warranty. Vendors like Covalent Materials and Axus Technology are known for high-quality rework and testing.