Used AMAT Endura 5500: What's Actually For Sale in 2026, and What the Spares Cost
Used AMAT Endura 5500 buyer's guide: 128 tracked listings (32 complete tools, none with a public price), observed asking prices for 14 spare P/Ns, and the PO clause to use.
This guide is for: the 200mm fab or equipment manager who has been asked to find a used AMAT Endura 5500, has four browser tabs of "price on request" open, and needs to know what the market looks like before putting a number in the capex request.
Take a breath. A 5500 search feels like a maze because nobody publishes a tool price, but the market is readable once you separate complete tools from loose chambers and know what the consumables trade for. We track four surplus marketplaces daily. This guide is what that data says as of September 2026.
Here's why the sorting matters in dollars. A wafer orienter/degas chamber assembly for this platform lists at $4,500 to $7,900 on its own right now, so a "complete" tool that turns out to be missing one is a $6,500 surprise (the median ask) plus the weeks it takes to source it, while your process engineer explains to a VP why the metal layer is still on hold. The sentence to carry into the budget meeting: the tool price is negotiated in private, but the spares prices are public, and the spares are the one part of this purchase you can price before you call anyone.
The 30-Second Answer: You're Shopping a Chamber Market, Not a Tool Market
Between April 2 and September 6, 2026 we logged 128 Endura-family listings across CAE Online, FabSurplus, SurplusGLOBAL, and Machinio. Thirty-two were complete cluster tools. Seventy-nine were single chambers. Chambers outnumber tools two and a half to one, and only three of the 32 tools were labeled "Endura 5500" in the title, all at FabSurplus: a refurbished PVD cluster, a refurbished TxZ (CVD TiN) cluster, and an as-is tool with Al, Cr, Cr, and one empty chamber. Every one of the three was "inquire."
So the realistic path to a 5500 is usually a tool listed just as "Endura" plus a chamber or two bought separately. The platform runs 5", 6", or 8" wafers with dual loadlocks and staged buffer and transfer chambers, and it accepts aluminum PVD, refractory PVD (TiW, WSi, W), copper (IMP, SIP), degas, and CVD TiN (TxZ) modules, per HD Pacific's refurbisher spec sheet. A listing that says "Endura" and nothing else has told you almost nothing. Ask for wafer size and the chamber-by-chamber process list before you ask for a price.
What's Listed Right Now: 128 Listings, Four Marketplaces, Zero Public Tool Prices
| What's listed | Count | With a public asking price | |---|---|---| | Complete Endura cluster tools (any generation) | 32 | 0 | | ...of which titled "Endura 5500" | 3 | 0 | | Single chambers (chamber-only listings) | 79 | 0 | | Spares, consumables, manuals | 17 | 2 |
Source mix: FabSurplus 57, CAE Online 38, SurplusGLOBAL 26, Machinio 7. The CAE Online and Machinio rows were re-seen in the first week of September; the FabSurplus and SurplusGLOBAL rows were last confirmed in April and May, so treat those as "was available this year," and ask.
Of the 79 chamber-only listings, 36 titles say only "PVD chamber." The rest name the process, and the counts tell you what's easy to find: Al (3), WSi (3), degas (3), eSIP Ti (3), PCXT preclean (3), IMP copper (2), SIP Ti (2), EXTENSA Ti (2), and one each of TxZ, LTPVD, CIP, and a CVD Al chamber. Copper barrier/seed and refractory chambers are out there. A TxZ CVD TiN chamber is a one-of-one right now, so if your process needs it, that chamber drives the whole search.
Still with us? Good. The next table is the one worth bookmarking.
Spares Prices Nobody Else Publishes: 14 Endura 5500 P/Ns, September 2026
These are observed asking prices from active eBay US listings and Machinio, checked September 5 through 7, 2026. Asks, not sold prices. Counts are listings, so a seller with six identical rings counts six times.
| P/N | What it is | Listings | Observed asks | Median | |---|---|---|---|---| | 0020-21665 | Shield, Al/Ti, 8" wafer | 17 | $569–$1,250 per unit (one lot of 15 at $3,750) | $1,250 | | 0020-23042 | Adapter, source, 13" (chamber lid) | 10 | $846–$4,950 | $2,104 | | 0010-20079 | PVD driver / lamp chamber controller | 10 | $720–$2,500 used; $1,996–$2,199 new | $1,961 | | 0020-20340 | Door, transfer slit valve | 9 | $150–$325 | $200 | | 0020-21362 | Clamping ring, 6" Ti | 8 | $1,200–$2,100 | $2,100 | | 0021-06148 | TAB clamp ring, 8" semi-notch | 7 | $555–$1,700 | $996 | | 0290-20003 | Wafer orienter / degas chamber assembly | 6 | $4,500–$7,900 | $6,500 | | 0242-22840 | Electrical kit, SLTESC PVD chamber | 5 | $595–$1,950 | $1,670 | | 0020-28364 | Blade, 6" Adv 101 shutter | 4 | $935–$1,500 | $1,050 | | 0021-35793 | Shadow ring, 200mm Cu | 3 | $505–$2,425 | $615 | | 0240-13274 | Robot motor, 5-phase Vexta | 1 | $2,000 (used) | – | | 0020-21361 | Clamping ring, 6" Al | 2 | $1,509 and $2,500 (both refurbished) | – | | 0010-20422 | Shield treatment and cover, 8" | 2 | $507 and $996 | – | | 0020-21668 | Adapter, 13" source, high neck | 1 | $2,000 | – |
Two P/Ns we checked came back with zero priced listings anywhere: 0020-21365 (6" TiW clamping ring) and 90240-17210 (cryo pump kit, low-vibration, 50 Hz). Both are on Machinio at "price on request." If a seller quotes you a number on either, you're getting one of the few data points that exist.
Three things in that table will save you money if you read them the right way. The 6" Ti clamping ring looks like a $2,100 part, but six of the eight listings are one seller at exactly $2,100 and the other two are $1,200 and $1,700, so the real floor is lower than the median suggests. The $4,950 top ask on the 13" source adapter is a bundle that includes an 8" shield and a second adapter, so don't price a bare lid off it. And the $8,401 listing we dropped from the driver row is a full per-chamber electrical kit, a different product that happens to share a P/N in its title.
Two Dead Ends We Can Save You
- A "complete, refurbished" tool where the seller won't list the chambers by process and target material. Given how the market is structured, that tool may have been assembled from the same chamber-only pool you're looking at, which is fine, but you should know it and price it that way.
- Any spare priced off a lot or bundle listing. The lot of 15 shields at $3,750 works out to $250 each, which is real, but only if you want 15. Single-unit asks on that shield run $569 to $1,250.
The PO Clause That Makes a Cluster Tool Inspectable
Paste something like this into the purchase order. It contains no price and every seller with a working tool can sign it.
"Seller attaches as Exhibit A a chamber-by-chamber configuration list (process, target material, wafer size, cryo pump serial numbers) and warrants that each process chamber, the buffer chamber, and the transfer chamber pump to the base pressure recorded in the tool's most recent PM log, with leak-up rate logged over an agreed interval, tested within 48 hours of shipment and documented. Any chamber failing to reach its logged base pressure on receipt inspection within 5 business days is a material defect."
A seller who can't produce Exhibit A has answered your first question already. See our Endura PVD buying guide for the configuration and chamber-history checks once you have that list in hand.
FAQ
"used amat endura 5500" We tracked 32 complete Endura cluster tools across four marketplaces from April to September 2026; three were titled "Endura 5500," none had a public asking price. Current inventory: AMAT Endura 5500.
"amat endura 5500 price" No seller we track publishes one. All 32 complete tools were "inquire" or "as is, where is." Spares prices are public; see the table above.
"endura 5500 parts" Observed September 2026 asks: transfer slit valve door 0020-20340 $150–$325; 8" Al/Ti shield 0020-21665 $569–$1,250 per unit; 13" source adapter 0020-23042 $846–$4,950; orienter/degas assembly 0290-20003 $4,500–$7,900. Live pages: 0020-23042 chamber lid, 0021-06148 TAB clamp ring.
"endura 5500 clamp ring price" The 8" TAB clamp ring 0021-06148 listed at $555 to $1,700 (median $996) across seven listings; the 6" Ti clamping ring 0020-21362 at $1,200 to $2,100 across eight, six of them one seller.
"endura pvd chamber for sale" 79 chamber-only listings in our tracked set, 36 of them titled only "PVD chamber." Named processes available: Al, WSi, degas, eSIP Ti, PCXT preclean, IMP Cu, SIP Ti, EXTENSA Ti, and single units of TxZ, LTPVD, and CIP.
What to Do Next
- Write down your wafer size and the chamber lineup you need, by process and target material. That's free, and it turns "Endura" listings into yes/no answers.
- Price your first-year spares off the table above before you negotiate the tool. You'll know what a seller's "spares included" is worth.
- Put the Exhibit A clause in the PO before the price conversation. It costs nothing and it's the fastest way to sort refurbishers from resellers.
- Or email parts@caladansemi.com with the chamber list. We'll tell you which of the 32 tools and 79 chambers we've tracked still fit, and what the spares have been listing for.
You've got this. The hard part of a 5500 search was never the tool; it was not knowing what's out there. Now you do.
Related reading: Buying a Used AMAT Endura PVD | AMAT Centura vs Endura
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.