Used Cryo Etch Equipment: Oxford & Trion Checks
Buying used cryo etch equipment? Compare Oxford and Trion offers by installed configuration, cold-stage evidence, utilities and sample-wafer acceptance.
Buy the documented configuration, not the model name
When reviewing a used Oxford or Trion etcher advertised for cryogenic work, ask for the serial number, installed-options list and a demonstrated process before discussing price. Apply the same checks to any Plasma-Therm alternative. Keep cryogenic capability as an open requirement until the offered configuration is documented and tested.
Caltech documents an Oxford Plasmalab System 100 ICP-RIE 380 configured for Bosch DRIE with a variable-temperature stage.
Use institutional installations as examples of documented configurations, not proof that another machine with a similar name has the same hardware or process capability.
Compare Oxford, Trion and other offers on the same basis
Build a configuration sheet for every candidate. Have the seller supply the evidence below and have your process engineer mark each requirement as verified, untested or not met.
- Identity: Exact system and chamber model, serial number, build documentation, modifications and service history.
- Substrate handling: Installed stage, chuck or carrier, loading arrangement and the substrate sizes demonstrated on that unit.
- Process hardware: Gas delivery configuration, RF equipment, pumping arrangement, temperature-control hardware and installed sensors.
- Controls: Software version, recipe access, backups, licensed features and available installation or service documentation.
- Included scope: Pumps, cooling equipment, connection hardware, fixtures, spares and any accessories excluded from the price.
Do not rank brands by a generic wafer-size limit or advertised aspect ratio. Request results for your material, mask, feature geometry and substrate stack.
Review cold-stage condition and process history
Request maintenance records, previous process materials, cleaning procedures and any stage repairs. Ask for photographs and the applicable service inspection report. Have the process owner review the history before accepting the chamber for your work.
Specify a witnessed test of the temperature-control sequence over your required operating conditions. Ask for the sensor locations, calibration records, setpoints, measured temperatures and time-series logs. Document alarms and any untested functions rather than treating a successful startup as full acceptance.
Require inspection and any cryogenic or electrical work to follow the applicable equipment procedures with qualified personnel. Agree on acceptable findings and remedies before the test.
Define sample-wafer acceptance before purchase
Select representative samples with your process engineer. Write down the material stack, mask, feature dimensions, target depth and intended process. Require a documented recipe and measurements tied to identified samples.
Agree on pass/fail limits for the outcomes relevant to your application: profile, depth, uniformity, surface condition, mask loss and repeatability. Specify the measurement method and sampling locations. Keep raw results, images and logs with the acceptance report.
If you are comparing Bosch and cryogenic process routes, request separate demonstrations against the same device requirements. Do not assume either route is the better choice without reviewing the measured results.
Check site readiness and the total quote
Ask for the serial-specific installation checklist. Review electrical supply, gas services, exhaust or abatement, cooling, vacuum services, floor space and access with your facilities team. If liquid nitrogen is specified, confirm the supply arrangement and operating requirements from the equipment documentation. Have the site's responsible specialists approve the plan.
Request separate prices for the tool, inspection, repairs, packing, transport, installation, training and acceptance at your site. Obtain a written exclusions list and responsibility for each commissioning step. Keep an unpriced repair or missing accessory visible as an open item.
Buyer questions
Does an Oxford or Trion model name confirm cryogenic capability?
Require the installed-stage and option records, then verify the intended process on the offered machine.
What should we budget for a used cryo etcher?
Request configuration-matched quotes and a separate commissioning scope. Do not use a bare-tool asking price as the complete project budget.
What if the seller cannot run our samples?
Treat process acceptance as unresolved. Agree on independent testing, conditional acceptance or another documented remedy before committing to purchase.
Related buying resources
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.