APEX 3013 — RF Generator, 3kW/13.56MHz (Advanced Energy)

Name: APEX 3013 — RF Generator, 3kW/13.56MHz (Advanced Energy)
Brand: Advanced Energy
SKU: APEX 3013
Price: 5963 USD

Part No. APEX 3013

Market Price

→ Stable

28 active listings

$3K–$15K

Typical secondary market pricing · USD

Low $2,500Avg $5,963High $15,125

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $3K – $15K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market price (observed)

$2,500 to $15,125

28 listings · last checked Sep 11, 2026 · asking prices, not sold

Source: ebay

Get an exact quote →parts@caladansemi.com

How much does a used APEX 3013 — RF Generator, 3kW/13.56MHz (Advanced Energy) cost in 2026?

A used APEX 3013 — RF Generator, 3kW/13.56MHz (Advanced Energy) from Advanced Energy typically sells for $3k – $15k on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Advanced Energy Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used APEX 3013 — RF Generator, 3kW/13.56MHz (Advanced Energy) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

APEX 3013 Specifications and Compatible Tools

Key specs: 3kW peak power, 13.56MHz frequency, 208–480V AC input, 15 SCFM cooling air flow. Designed for 24/7 operation in plasma systems.

Compatible tools:

AMAT Centura DPS (2003–2010 models)
Lam 2300 Kiyo (rev 2.1–3.4 systems)
Novellus Speed CVD (pre-2012 installations)

Warning: The APEX 3013 requires power supply AEX-PS-3013A. Later 2300 Kiyo models (rev 4.0+) use AEX-PS-3013B, which is not backward compatible without a field upgrade kit (Advanced Energy part 3013-PS-UPGRADE).

What to Check Before Buying a Used APEX 3013 in 2026

RF Output Stability: Measure peak-to-peak variation using a Bird 43 directional wattmeter. Reject units with >5% deviation at full power.
Cooling System: Confirm airflow rate ≥14 SCFM under load. Leaks in the air manifold (part AEX-AIR-3013) cause overheating.
Power Supply Health: Test AEX-PS-3013 output voltage; must maintain 285–305V DC under 3kW load. Capacitor bulge or ESR >0.2Ω indicates failure.
Lifecycle Metrics: Request service logs. Units with >35,000 RF-hours since last rebuild are high-risk.
Front-Panel Display: Verify error code 12-03 (cooling fault) does not trigger falsely—common in units with corroded air filters.

FAQ

Q: Why is the 2026 price lower than 2025?
A: Increased supply from decommissioned 2003–2010 AMAT Centura DPS tools. Demand remains steady for Lam 2300 Kiyo upgrades.

Q: Is the APEX 3013 better than the 2026-gen APEX 5000?
A: No. The 5000 series offers 5kW output and digital modulation. However, the 3013 is cheaper and fits legacy tools.

Q: Does it work in 2026-vintage Novellus systems?
A: Only pre-2012 models. Post-2012 units require the APEX 3025 with I2C interface.

Q: How to verify “refurbished” claims?
A: Ask for a rebuild log showing replaced parts (e.g., AEX-CAP-3013B, AEX-PS-3013A) and a 24-hour stress test report.