Used Advanced Energy RF Generator

Market Price

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3 active listings

From $500

Typical secondary market pricing · USD

Low $500Avg $500High $500

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $500 – $500

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Used Advanced Energy RF Generator cost in 2026?

A used Used Advanced Energy RF Generator from Advanced Energy typically sells for $500 – $500 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Advanced Energy RF Power vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Advanced Energy RF Generator from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Overview

This used Advanced Energy RF generator operates at 13.56 MHz and delivers up to 2000W of output power. Widely used in plasma etch, CVD, and PVD systems from OEMs including Lam Research, Applied Materials, and Novellus. The unit has been bench-tested for power output, frequency accuracy, and fault-free operation under load. Advanced Energy generators are known for their precision impedance matching and reliable RF delivery.

Specifications

Manufacturer	Advanced Energy Industries
Frequency	13.56 MHz ± 0.005%
Output Power	2000W maximum
Input Voltage	208 / 240V AC, 3-phase
Efficiency	> 85%
Impedance	50Ω nominal
Cooling	Water-cooled
Condition	Used / Bench-Tested
Warranty	60-day functional warranty

Recent Market Listings

Updated May 19

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Frequently Asked Questions

What plasma process tools is this RF generator compatible with?

This generator is compatible with a wide range of plasma etch, CVD, and sputter deposition systems from Lam Research, AMAT, Tokyo Electron, and Novellus. Verify your matching network impedance requirements before installation.

How is the unit tested before sale?

The generator is bench-tested at full power into a 50Ω dummy load for a minimum of 2 hours. We verify output power, frequency stability, reflected power protection, and all fault/alarm functions.

Can I get calibration documentation?

Yes. A test report with power output measurements and frequency verification is included with each unit. NIST-traceable calibration certificates are available upon request for an additional fee.