AMAT 0020-09564 Focus Ring

Name: AMAT 0020-09564 Focus Ring
Brand: Applied Materials

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for AMAT 0020-09564 Focus Ring moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used AMAT 0020-09564 Focus Ring cost in 2026?

Pricing for used AMAT 0020-09564 Focus Ring units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT 0020-09564 Focus Ring from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

AMAT 0020-09564 Specifications and Compatible Tools

This ceramic focus ring operates at 13.56 MHz RF, with a ±5% tolerance on 2.45 GHz microwave coupling. Dimensions: 298 mm OD × 45 mm H (±0.1 mm tolerance). Compatible with:

AMAT Centura DPS 5500 (1998–2005)
MxP 5000 Etch Chamber (2001–2008)
eMax 5500 Etch System (2004–2012)

Exclusion: Not compatible with AMAT 0020-12345 (requires wider 310 mm OD ring). Verify chamber model via serial tag ST-09876 or later; pre-2003 units use a different mounting bracket.

What to Check Before Buying a Used AMAT 0020-09564 in 2026

Erosion depth: Use a digital micrometer to confirm ≤0.3 mm material loss from original 45 mm height.
Crack inspection: Scan with a 10X fiber-optic borescope for hairline fractures >0.1 mm (per SEMI E10-07).
Surface finish: Profile with a Taylor Hobson PGI 860 to verify