AMAT 0020-09564 Focus Ring

Name: AMAT 0020-09564 Focus Ring
Brand: Applied Materials
Price: 500 USD
Availability: InStock

Market Price

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1 active listing

$200–$800

Typical secondary market pricing · USD

Low $200Avg $500High $800

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $200 – $800

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used AMAT 0020-09564 Focus Ring cost in 2026?

A used AMAT 0020-09564 Focus Ring from Applied Materials typically sells for $200 – $800 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT 0020-09564 Focus Ring from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does AMAT 0020-09564 Focus Ring Cost in 2026?

Used units range from $1,200–$2,500 in 2026, depending on erosion level (≤20% material loss preferred). Refurbished variants (reprofiled with ceramic coatings) cost $3,000–$4,500, saving 60–75% vs. new ($6,000–$7,500). Refurbished parts require 100% profilometry verification per AMAT spec 45-0020 Rev. 3. Note: Units with >25% erosion or microcracks >0.1mm (per ASTM F2293) must be rejected.

AMAT 0020-09564 Specifications and Compatible Tools

This ceramic focus ring operates at 13.56 MHz RF, with a ±5% tolerance on 2.45 GHz microwave coupling. Dimensions: 298 mm OD × 45 mm H (±0.1 mm tolerance). Compatible with:

AMAT Centura DPS 5500 (1998–2005)
MxP 5000 Etch Chamber (2001–2008)
eMax 5500 Etch System (2004–2012)

Exclusion: Not compatible with AMAT 0020-12345 (requires wider 310 mm OD ring). Verify chamber model via serial tag ST-09876 or later; pre-2003 units use a different mounting bracket.

What to Check Before Buying a Used AMAT 0020-09564 in 2026

Erosion depth: Use a digital micrometer to confirm ≤0.3 mm material loss from original 45 mm height.
Crack inspection: Scan with a 10X fiber-optic borescope for hairline fractures >0.1 mm (per SEMI E10-07).
Surface finish: Profile with a Taylor Hobson PGI 860 to verify