AMAT 0020-21365 Clamping Ring: Endura Buying Checks

Sourcing against the listing name “AMAT 0020-21365 Endura PVD 5500 clamping ring 6-inch TiW”? Use that description as the starting point for an identification check. Request the label, drawing and chamber bill of materials before approving the part for your application.

What to match before ordering

• Full identification: Request readable part markings, packaging labels and any revision or suffix. Compare them character by character with the required part.
• Chamber configuration: Provide the tool and chamber identifiers and the approved process-kit BOM. Have your engineer review the offered item against that record.
• Geometry: Request the approved drawing and a dimensional inspection report covering the features your engineer identifies.
• History: Ask for the previous application, cleaning/refurbishment work and any material or dimensional changes.

Require documented approval for a substitute. Do not treat a matching platform name as confirmation of wafer-format, process or revision compatibility.

Condition and acceptance criteria

Ask for photographs of both faces, contact areas, edges and markings. Request an inspection report identifying observed wear, deposits, surface damage and any rework.

Have your engineer set acceptable dimensional and surface-condition limits from the approved drawing and process requirements. Ask the seller to identify the inspection method and instruments. Agree on the remedy if the delivered part does not match the approved identification or acceptance report.

For a cleaned or refurbished offer, request the work scope and post-work inspection results. Leave unverified condition descriptions open until the supporting records are supplied.

Request a unit-specific quote

Include part number 0020-21365, the required revision, chamber identifiers, drawing reference, quantity and destination. Ask the seller to state the offered condition, traceability, inspection scope, packaging, price and proposed shipment date.

Does this fit my Endura chamber? Require a BOM or approved engineering cross-reference for your exact configuration before ordering.

Is the advertised 6-inch TiW description sufficient? Confirm the wafer-format and process designation from the applicable drawing or OEM record rather than the listing title alone.

What stock or delivery is available? Request current confirmation for the specific offered item, along with quote validity and dispatch conditions.

Related buyer resources

• Endura 0020-21361 backing-plate listing
• Endura 0020-23042 chamber-lid listing
• Used Endura PVD parts buying guide