AMAT 0021-03321 CVD Chamber Pumping Liner

Name: AMAT 0021-03321 CVD Chamber Pumping Liner
Brand: Applied Materials
SKU: 0021-03321
Price: 650 USD
Availability: InStock

Part No. 0021-03321

Market Price

→ Stable

From $650

Typical secondary market pricing · USD

Low $650Avg $650High $650

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-11

Request Quote · $650 – $650

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used AMAT 0021-03321 CVD Chamber Pumping Liner cost in 2026?

A used AMAT 0021-03321 CVD Chamber Pumping Liner from Applied Materials typically sells for $650 – $650 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT 0021-03321 CVD Chamber Pumping Liner from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does AMAT 0021-03321 CVD Chamber Pumping Liner Cost in 2026?

Used prices for 0021-03321 range from $650–$650 in Q1 2026, with refurbished units unavailable due to low demand. New units from Applied Materials cost $3,200–$3,400, offering 78–82% savings over used. Note: Liners with deposition thickness >0.5mm on inner walls (measured via profilometer) require derating by 15–20% in vacuum performance. Always verify chamber pressure specs before installation.

AMAT 0021-03321 Specifications and Compatible Tools

This quartz-based liner operates at 200–400°C, with a 304 stainless steel flange (ANSI B16.36-1978). Key dimensions: 650mm height × 550mm OD. Compatible with:

Centura 5500 (1998–2003)
Reflexion XP1200 (2001–2006)
Producer 5000 (1995–1999)
Exclusion: Not compatible with Endura 8200 (part 0021-03456) due to divergent port configurations. Confirm tool serial numbers before purchase.

What to Check Before Buying a Used AMAT 0021-03321 in 2026

Crack inspection: Use UV light (365nm wavelength) to detect microfractures in quartz; reject if >2 cracks exist.
Deposition layer: Measure thickness via optical profilometer; >0.5mm requires derating.
Flange seal integrity: Test with helium mass spectrometer (leak rate <1×10⁻⁹ mbar·L/s).
Installation history: Verify replacement cycles—liners >5 replacements in 3 years show accelerated erosion.
Surface finish: Check Ra value (roughness