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Applied Materials

AMAT 0021-03321 CVD Chamber Pumping Liner

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Applied Materials

AMAT 0021-03321 CVD Chamber Pumping Liner

Part No. 0021-03321

Market Price

→ Stable

$650

One observed secondary-market listing · USD

Low $650Avg $650High $650

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-08-11

Request Quote · $650 (one observed listing)

Talk to a specialist · parts@caladansemi.com

Request a quote for P/N 0021-03321Response within 4 hours

✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Market Data

Coming Soon for AMAT 0021-03321 CVD Chamber Pumping Liner

Price history and market activity data is being compiled.

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How much does a used AMAT 0021-03321 CVD Chamber Pumping Liner cost in 2026?

One observed secondary-market listing for a used AMAT 0021-03321 CVD Chamber Pumping Liner from Applied Materials: $650 (2026). A single observation is not a market range. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT 0021-03321 CVD Chamber Pumping Liner from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

The 0021-03321 is a pumping liner used inside a CVD process chamber on Applied Materials equipment. Liners of this type line the interior chamber wall and direct gas flow toward the exhaust, protecting the chamber body from deposition and erosion. It is a consumable part replaced during routine chamber maintenance as part of the process kit.

Observed Market Pricing

We have 1 observed listing for 0021-03321 at $650.

Condition Observed price Source Observed
New $650 SurplusGlobal Aug 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 0021-03321: new. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

Inspect liners for deposition buildup, cracking, or warping before installation. Even new old-stock pieces should be checked for handling damage, as liners are dimensionally sensitive and a poor fit can affect gas flow and process uniformity.

Frequently Asked Questions

Q: How much does AMAT 0021-03321 cost? A: We've observed 0021-03321 listed at $650. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Q: Which tools does 0021-03321 fit? A: The description does not specify a particular AMAT tool platform, so compatibility should be confirmed by matching this P/N against your tool's bill of materials. We verify fit before quoting — reach out with your tool configuration.

Q: What condition options are available for 0021-03321? A: We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 0021-03321? A: Use the quote form on this page — the part number 0021-03321 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30
AskSep 23, 2026

$553

As-is
AskSep 16, 2026

$650

Used
AskSep 9, 2026

$650

Refurbished

Place a bid · Prices update daily

Frequently Asked Questions

How much does AMAT 0021-03321 cost?

We've observed 0021-03321 listed at $650. That's a market asking price, not our quote — condition and warranty terms change the number. Submit the quote form for current pricing.

Which tools does 0021-03321 fit?

The description does not specify a particular AMAT tool platform, so compatibility should be confirmed by matching this P/N against your tool's bill of materials. We verify fit before quoting — reach out with your tool configuration.

What condition options are available for 0021-03321?

We've seen this P/N offered as: new. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 0021-03321?

Use the quote form on this page — the part number 0021-03321 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts

Get a Quote

Market: $650 (one observed listing)

Response within 4 hours. Export compliance handled.

Email parts@caladansemi.com

Or call us during business hours

Secondary Market

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All transactions are export compliant · Escrow available · parts@caladansemi.com