Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD

Name: Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD
Brand: Applied Materials
SKU: 0021-14152

Part No. 0021-14152

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD cost in 2026?

Pricing for used Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

0021-14152 Specifications and Compatible Tools

Key specs: 13.56MHz RF, 250–500W input, 1.5–5sccm gas flow (N2/SiH4), 2.0–4.0kV bias voltage. Designed for P5000 Producer (200mm) PECVD systems (models 5010, 5020, 5030, 2004–2012 vintage). Not compatible with 0021-14151 due to divergent port matrix layouts. Confirm chamber ID match (AMAT part 0021-14100) before installation. Avoid using with 300mm P5000 variants without adapter plate 0021-14153. Cross-check AMAT ECO #47823 for 2024 design revisions affecting O-ring grooves.

What to Check Before Buying a Used 0021-14152 in 2026

Port blockage: Use a 1.0mm diameter probe to verify unobstructed gas channels—reject units with >3% plugged orifices.
Surface integrity: Measure microfinish (Ra ≤ 1.6µm) with profilometer; pitting >50µm depth invalidates part.
Flow uniformity: Conduct mass flow controller (MFC) test at 3sccm—variation >±5% across ports requires derating.
Thermal stress cracks: Inspect via 5× magnifier for radial fractures within 20mm of edge—common after 25,000+ cycles.
Lifecycle data: Require AMAT PM logs showing <15,000 cumulative process hours and no >300°C thermal shock events in 2023–2026.

Q: Is a used 0021-14152 better than a refurbished one for 2026?
A: Refurbished units with <5,000 post-restore hours and AMAT-certified rebuilds (part 0021-14152-R) offer better long-term reliability. Used parts may require immediate reflow testing.

Q: Does 0021-14152 work with P5000 Producer models from 2008?
A: Yes, but verify chamber ID stamping (0021-14100) matches. 2008–2010 models require seal upgrade kit 0021-14154 for >300 cycle lifecycles.

Q: How to test for gas leakage in 2026 sourcing?
A: Use helium mass spectrometer leak detection at 1×10⁻⁵ threshold. Apply soap solution to port seals during vacuum hold test (>10min).

Q: What’s the lead time for 2026?
A: 2–4 weeks after sourcing confirmation, assuming stock in AMAT’s 2024 decommissioned fleet. Expedited options available for +15% fee.