Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD

Name: Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD
Brand: Applied Materials
SKU: 0021-14152
Price: 1504 USD
Availability: InStock

Part No. 0021-14152

Market Price

→ Stable

2 active listings

From $2K

Typical secondary market pricing · USD

Low $1,504Avg $1,504High $1,504

Save 40-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD cost in 2026?

A used Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD from Applied Materials typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Applied Materials 0021-14152 Gas Distribution Plate (Showerhead) for P5000 PECVD from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 0021-14152 Cost in 2026?

As of 2026, used 0021-14152 units range from $18,000–$24,000 depending on lifecycle metrics. Refurbished variants with <10,000 RF-hours and verified flow uniformity (±3%) cost $22,000–$26,000. New OEM pricing exceeds $65,000, making used/refurbished options 40–70% cheaper. Units with >40,000 RF-hours show >15% pressure drop in port-to-port distribution—reject these for critical processes. Always verify recent helium leak test results (<1×10⁻⁶ atm·cc/sec) and thickness measurements (≥4.7mm per ASME B46.1). Price variance reflects tool-specific wear patterns from 2018–2023 production cycles.

0021-14152 Specifications and Compatible Tools

Key specs: 13.56MHz RF, 250–500W input, 1.5–5sccm gas flow (N2/SiH4), 2.0–4.0kV bias voltage. Designed for P5000 Producer (200mm) PECVD systems (models 5010, 5020, 5030, 2004–2012 vintage). Not compatible with 0021-14151 due to divergent port matrix layouts. Confirm chamber ID match (AMAT part 0021-14100) before installation. Avoid using with 300mm P5000 variants without adapter plate 0021-14153. Cross-check AMAT ECO #47823 for 2024 design revisions affecting O-ring grooves.

What to Check Before Buying a Used 0021-14152 in 2026

Port blockage: Use a 1.0mm diameter probe to verify unobstructed gas channels—reject units with >3% plugged orifices.
Surface integrity: Measure microfinish (Ra ≤ 1.6µm) with profilometer; pitting >50µm depth invalidates part.
Flow uniformity: Conduct mass flow controller (MFC) test at 3sccm—variation >±5% across ports requires derating.
Thermal stress cracks: Inspect via 5× magnifier for radial fractures within 20mm of edge—common after 25,000+ cycles.
Lifecycle data: Require AMAT PM logs showing <15,000 cumulative process hours and no >300°C thermal shock events in 2023–2026.

Q: Is a used 0021-14152 better than a refurbished one for 2026?
A: Refurbished units with <5,000 post-restore hours and AMAT-certified rebuilds (part 0021-14152-R) offer better long-term reliability. Used parts may require immediate reflow testing.

Q: Does 0021-14152 work with P5000 Producer models from 2008?
A: Yes, but verify chamber ID stamping (0021-14100) matches. 2008–2010 models require seal upgrade kit 0021-14154 for >300 cycle lifecycles.

Q: How to test for gas leakage in 2026 sourcing?
A: Use helium mass spectrometer leak detection at 1×10⁻⁵ threshold. Apply soap solution to port seals during vacuum hold test (>10min).

Q: What’s the lead time for 2026?
A: 2–4 weeks after sourcing confirmation, assuming stock in AMAT’s 2024 decommissioned fleet. Expedited options available for +15% fee.