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Applied Materials

AMAT 0021-35163 Gold-Plated RTP Reflector Plate, 200mm Chamber Bottom

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Applied Materials

AMAT 0021-35163 Gold-Plated RTP Reflector Plate, 200mm Chamber Bottom

Part No. 0021-35163

Market Price

→ Stable

$999–$10K

Typical secondary market pricing · USD

Low $999Avg $5,404High $9,809

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-09-24

Request Quote · $999 – $10K

Talk to a specialist · parts@caladansemi.com

Request a quote for P/N 0021-35163Response within 4 hours

✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Market Data

Coming Soon for AMAT 0021-35163 Gold-Plated RTP Reflector Plate, 200mm Chamber Bottom

Price history and market activity data is being compiled.

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How much does a used AMAT 0021-35163 Gold-Plated RTP Reflector Plate, 200mm Chamber Bottom cost in 2026?

A used AMAT 0021-35163 Gold-Plated RTP Reflector Plate, 200mm Chamber Bottom from Applied Materials typically sells for $999 – $10k on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT 0021-35163 Gold-Plated RTP Reflector Plate, 200mm Chamber Bottom from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

What This Part Is

This is a gold-plated reflector plate designed for the bottom of a 200mm rapid thermal processing (RTP) chamber. The gold plating provides high infrared reflectivity to help control thermal uniformity during rapid thermal anneal and oxidation processes. It is an Applied Materials OEM part, Rev A, listed as a chamber bottom component.

Observed Market Pricing

Observed asking prices for 0021-35163 range from $999 to $9,809 across 9 listings we track.

Condition Observed price Source Observed
Used $999 ebay Sep 2026
Gebraucht $1,209 ebay Sep 2026
Used $1,266 ebay Sep 2026
Used $1,500 ebay Sep 2026
Used $2,000 ebay Sep 2026
New $2,696 ebay Sep 2026
Used $3,000 ebay Sep 2026
New – Open box $3,251 ebay Sep 2026
Usato $9,809 ebay Sep 2026

These are observed market asking prices, not our quotes. Condition, revision level, packaging (OEM-sealed vs. open surplus), and warranty terms move the number significantly. Use the quote form below for a current, firm price.

Condition Options and Lead Time

Conditions we've observed on the market for 0021-35163: gebraucht, new, new – open box, usato, used. Availability in a specific condition changes week to week.

Lead time depends on where the part is sourced; we confirm it with the quote, and parts already on a partner's shelf ship faster. Every unit is inspected before shipment.

Inspect the gold-plated surface closely for scratches, pitting, or delamination, as surface damage directly affects thermal reflectivity and process uniformity. Handling damage is common on used reflector plates, so request photos of the plated face before purchasing.

Frequently Asked Questions

Q: How much does AMAT 0021-35163 cost? A: Observed market asking prices run $999 to $9,809 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Q: Which tools does 0021-35163 fit? A: The description identifies this as a 200mm RTP chamber bottom reflector plate, but does not specify a particular tool model. Compatibility should be confirmed by cross-referencing this part number against your tool's BOM — we verify fit before quoting.

Q: What condition options are available for 0021-35163? A: We've seen this P/N offered as: gebraucht, new, new – open box, usato, used. Tell us your condition requirement in the quote form and we'll source to it.

Q: How do I get a quote for 0021-35163? A: Use the quote form on this page — the part number 0021-35163 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Recent Market Listings

Updated Sep 30
AskSep 23, 2026

$849

As-is
AskSep 16, 2026

$3,642

Used
AskSep 9, 2026

$7,166

Refurbished

Place a bid · Prices update daily

Frequently Asked Questions

How much does AMAT 0021-35163 cost?

Observed market asking prices run $999 to $9,809 depending on condition. As-is pulls sit at the bottom of the range; tested or refurbished units with warranty at the top. Submit the quote form for a firm current price.

Which tools does 0021-35163 fit?

The description identifies this as a 200mm RTP chamber bottom reflector plate, but does not specify a particular tool model. Compatibility should be confirmed by cross-referencing this part number against your tool's BOM — we verify fit before quoting.

What condition options are available for 0021-35163?

We've seen this P/N offered as: gebraucht, new, new – open box, usato, used. Tell us your condition requirement in the quote form and we'll source to it.

How do I get a quote for 0021-35163?

Use the quote form on this page — the part number 0021-35163 is attached to your request automatically — or email parts@caladansemi.com. We respond within one business day with price, condition, and lead time.

Related Parts

Quick Info

ConditionUsed
CategoryProcess Kit & Chamber Parts

Get a Quote

Market: $999 – $10K

Response within 4 hours. Export compliance handled.

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Secondary Market

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