Applied Materials 0021-36716 Edge Ring: Plasma Confinement for Producer GT PECVD

Name: Applied Materials 0021-36716 Edge Ring: Plasma Confinement for Producer GT PECVD
Brand: Applied Materials
SKU: 0021-36716

Part No. 0021-36716

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Applied Materials 0021-36716 Edge Ring: Plasma Confinement for Producer GT PECVD moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Applied Materials 0021-36716 Edge Ring: Plasma Confinement for Producer GT PECVD cost in 2026?

Pricing for used Applied Materials 0021-36716 Edge Ring: Plasma Confinement for Producer GT PECVD units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Applied Materials 0021-36716 Edge Ring: Plasma Confinement for Producer GT PECVD from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Applied Materials 0021-36716 Specifications and Compatible Tools

Material: High-purity silicon (99.99% Si), 300mm diameter, 45° beveled edge
Max Temp: 400°C, Plasma Voltage: 1,300V RF, Pressure Range: 1–50 mTorr
Compatible Tools:
- AMAT Producer GT PECVD (Rev. 7.2, 2012–2018)
- AMAT Centura DSiE PECVD (Rev. 5.1, 2010–2015)
- Lam Research P5000 Series (non-AMAT tools require adapter plate 0021-36716-AP1)
Exclusion: Incompatible with AMAT Producer HDP-CVD (part 0021-36717 uses a different profile).

What to Check Before Buying a Used 0021-36716 in 2026

Crack Inspection: Use 5× magnifier; reject parts with radial cracks >0.2mm (per SEMI E10-07).
Thickness Measurement: Confirm minimum 2.8mm cross-section at 30° edge angle using a digital micrometer (Mitutoyo 500-196-30).
Plasma Uniformity Test: Run a dummy wafer with profilometer (KLA P9000) to verify <±5% thickness variation in 0–5mm edge zone.
Cycle Count: Reject parts with >800 cycles (AMAT’s spec for Producer GT PECVD).
Surface Contamination: Check for silicon nitride buildup >50µm using ellipsometry; excessive buildup causes arcing.