0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials)

Name: 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials)
Brand: Applied Materials
SKU: 0021-39264-001
Price: 35000 USD
Availability: InStock

Part No. 0021-39264-001

Market Price

→ Stable

$16K–$54K

Typical secondary market pricing · USD

Low $16,000Avg $35,000High $54,000

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $16K – $54K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials) cost in 2026?

A used 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials) from Applied Materials typically sells for $16k – $54k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 0021-39264-001 Cost in 2026?

In May 2026, used 0021-39264-001 electrostatic chucks range from $16,000–$35,000, while refurbished units with <10,000 RF-hours sell for $36,000–$54,000. New OEM units list above $80,000, making used/refurbished models 50–70% cheaper. Prices vary based on RF-hour count, ceramic wear, and gas port integrity. Units with >40,000 RF-hours typically require coil replacement (part 0021-39265-001), increasing maintenance costs. Refurbished units include voltage calibration and gas flow testing but exclude full vacuum seal verification. Market trend remains downward due to increased supply from decommissioned AMAT Centura DPS II systems in 2026.

0021-39264-001 Specifications and Compatible Tools

This 300mm electrostatic chuck operates at 5 kV DC, 13.56 MHz, with a maximum power rating of 2 kW and gas flow rate of 5–50 sccm. Compatible with AMAT Centura DPS II (1998–2005) and Centura AdvantEdge (2001–2007). Do not install in systems requiring 0021-39264-002 (2010+ models), as the later part uses a modified edge seal design. Verify tool serial numbers against AMAT spec sheet 98-7421 Rev. C to confirm compatibility. This model lacks the vacuum-assisted wafer release feature added in 2003, so retrofitting may require a 0021-39267-001 vacuum adapter.

What to Check Before Buying a Used 0021-39264-001 in 2026

RF-hour count: Reject units with >40,000 hours due to high coil failure risk.
Ceramic inspection: Use a 10X loupe to check for hairline cracks in the ceramic base (>0.1 mm thickness loss invalidates part).
Voltage retention test: Apply 5 kV DC with a Fluke 87V multimeter; voltage drop >5% after 10 minutes indicates dielectric degradation.
Gas flow calibration: Measure argon flow with a Brooks SLA5850 mass flow controller; deviation >±10% from 25 sccm requires port rework.
Tool lifecycle: Units from systems operational pre-2012 often have unrepairable edge erosion from legacy plasma recipes.

**Q: Is 0021-39264-001 compatible with AMAT Centura DPS II