0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials)

Name: 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials)
Brand: Applied Materials
SKU: 0021-39264-001

Part No. 0021-39264-001

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials) cost in 2026?

Pricing for used 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0021-39264-001 — Electrostatic Chuck Assembly, 300mm (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

0021-39264-001 Specifications and Compatible Tools

This 300mm electrostatic chuck operates at 5 kV DC, 13.56 MHz, with a maximum power rating of 2 kW and gas flow rate of 5–50 sccm. Compatible with AMAT Centura DPS II (1998–2005) and Centura AdvantEdge (2001–2007). Do not install in systems requiring 0021-39264-002 (2010+ models), as the later part uses a modified edge seal design. Verify tool serial numbers against AMAT spec sheet 98-7421 Rev. C to confirm compatibility. This model lacks the vacuum-assisted wafer release feature added in 2003, so retrofitting may require a 0021-39267-001 vacuum adapter.

What to Check Before Buying a Used 0021-39264-001 in 2026

RF-hour count: Reject units with >40,000 hours due to high coil failure risk.
Ceramic inspection: Use a 10X loupe to check for hairline cracks in the ceramic base (>0.1 mm thickness loss invalidates part).
Voltage retention test: Apply 5 kV DC with a Fluke 87V multimeter; voltage drop >5% after 10 minutes indicates dielectric degradation.
Gas flow calibration: Measure argon flow with a Brooks SLA5850 mass flow controller; deviation >±10% from 25 sccm requires port rework.
Tool lifecycle: Units from systems operational pre-2012 often have unrepairable edge erosion from legacy plasma recipes.