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Applied Materials

0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials)

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Applied Materials

0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials)

Name: 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials)
Brand: Applied Materials
SKU: 0021-93678-001

Part No. 0021-93678-001

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials) cost in 2026?

Pricing for used 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

0021-93678-001 Specifications and Compatible Tools

Key specs: 200mm diameter, 5kV DC bias voltage, 13.56MHz RF frequency, max power 2kW, and cooling flow rate of 15 LPM. Compatible with AMAT Centura HDP-CVD 5500 Series (2002–2008) and Centura Ultima HDP 5500X (2005–2010). Warning: Do not install on systems requiring 0021-93678-002 (2011+ models), as the later part uses a modified vacuum manifold. Cross-check tool serial numbers and maintenance logs to confirm compatibility. This chuck is designed for high-density plasma environments but lacks the thermal management upgrades in newer Applied Materials ESC variants.

What to Check Before Buying a Used 0021-93678-001 in 2026

Dielectric layer thickness: Minimum 0.8mm measured via ultrasonic gauge; <0.6mm requires replacement.
Coil resistance: Use a digital ohmmeter; DC resistance must be <0.5 ohms (spec per AMAT 5500-21234 Rev B).
Surface pitting: Reject units with craters >3mm in diameter, visible under 10x magnification.
Vacuum integrity: Test with a Pirani gauge; pressure drop >0.5 Torr over 10 minutes indicates seal failure.
Lifecycle data: Avoid units older than 6 years without recent recertification (AMAT recommends 5-year requalification). Always request RF-hour logs and prior fault codes (e.g., E-04 overtemperature events).

FAQ
Q: Is 0021-93678-001 better than 0021-93678-002?
A: No. The 0021-93678-002 (2011+) includes a redesigned vacuum port and thermal sensor, incompatible with pre-2011 HDP-CVD tools.

Q: How does 2026 pricing compare to 2025?
A: Prices dropped ~15% in 2026 due to increased supply from 200mm tool retirements. Refurbished units now dominate the market.

Q: Can I use this on a non-AMAT tool?
A: Only if the tool has a 200mm HDP-CVD-compatible ESC footprint (e.g., Lam Research P5). Custom adapters may be required.

Q: What if the part has 50,000 RF-hours?
A: Expect coil degradation.