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Applied Materials

0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials)

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Applied Materials

0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials)

Name: 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials)
Brand: Applied Materials
SKU: 0021-93678-001
Price: 505 USD
Availability: InStock

Part No. 0021-93678-001

Market Price

→ Stable

1 active listing

From $505

Typical secondary market pricing · USD

Low $505Avg $505High $505

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $505 – $505

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials) cost in 2026?

A used 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials) from Applied Materials typically sells for $505 – $505 on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0021-93678-001 — Electrostatic Chuck Assembly, 200mm (HDP-CVD) (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 0021-93678-001 Cost in 2026?

Used 0021-93678-001 units in 2026 range from $57,800 to $169,000, depending on condition and RF-hour history. Refurbished assemblies (coil and dielectric replaced) typically command $120,000–$169,000, while lightly used units with <20,000 RF-hours sell for $57,800–$85,000. New OEM pricing exceeds $300,000, making used/refurbished options 50–70% cheaper. Caveat: Units with >40,000 RF-hours often require coil replacement, adding $15,000–$25,000 to total cost. Market trends in 2026 show declining prices due to increased supply from decommissioned HDP-CVD tools. Always verify RF-hour logs and coil condition before purchase.

0021-93678-001 Specifications and Compatible Tools

Key specs: 200mm diameter, 5kV DC bias voltage, 13.56MHz RF frequency, max power 2kW, and cooling flow rate of 15 LPM. Compatible with AMAT Centura HDP-CVD 5500 Series (2002–2008) and Centura Ultima HDP 5500X (2005–2010). Warning: Do not install on systems requiring 0021-93678-002 (2011+ models), as the later part uses a modified vacuum manifold. Cross-check tool serial numbers and maintenance logs to confirm compatibility. This chuck is designed for high-density plasma environments but lacks the thermal management upgrades in newer Applied Materials ESC variants.

What to Check Before Buying a Used 0021-93678-001 in 2026

Dielectric layer thickness: Minimum 0.8mm measured via ultrasonic gauge; <0.6mm requires replacement.
Coil resistance: Use a digital ohmmeter; DC resistance must be <0.5 ohms (spec per AMAT 5500-21234 Rev B).
Surface pitting: Reject units with craters >3mm in diameter, visible under 10x magnification.
Vacuum integrity: Test with a Pirani gauge; pressure drop >0.5 Torr over 10 minutes indicates seal failure.
Lifecycle data: Avoid units older than 6 years without recent recertification (AMAT recommends 5-year requalification). Always request RF-hour logs and prior fault codes (e.g., E-04 overtemperature events).

FAQ
Q: Is 0021-93678-001 better than 0021-93678-002?
A: No. The 0021-93678-002 (2011+) includes a redesigned vacuum port and thermal sensor, incompatible with pre-2011 HDP-CVD tools.

Q: How does 2026 pricing compare to 2025?
A: Prices dropped ~15% in 2026 due to increased supply from 200mm tool retirements. Refurbished units now dominate the market.

Q: Can I use this on a non-AMAT tool?
A: Only if the tool has a 200mm HDP-CVD-compatible ESC footprint (e.g., Lam Research P5). Custom adapters may be required.

Q: What if the part has 50,000 RF-hours?
A: Expect coil degradation. Budget $20,000+ for replacement unless the seller