Applied Materials
AMAT 0040-09221 200mm Wafer CVD Chamber – P5000
Applied Materials
AMAT 0040-09221 200mm Wafer CVD Chamber – P5000
Part No. 0040-09221
Market Price
→ StableFrom $4K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-08-12
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for AMAT 0040-09221 200mm Wafer CVD Chamber – P5000
Price history and market activity data is being compiled.
How much does a used AMAT 0040-09221 200mm Wafer CVD Chamber – P5000 cost in 2026?
A used AMAT 0040-09221 200mm Wafer CVD Chamber – P5000 from Applied Materials typically sells for $4k – $4k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Applied Materials Process Kit & Chamber Parts vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used AMAT 0040-09221 200mm Wafer CVD Chamber – P5000 from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does AMAT 0040-09221 Cost in 2026?
The 2026 price for the AMAT 0040-09221 (used) is fixed at $3,507. No refurbished variants exist on the secondary market due to the part’s age and lack of OEM rebuild programs. This represents a 97.7% savings versus new pricing (c. $150,000 in 2003).
Critical caveat: Units produced before 2001 (common in this part’s lifecycle) may exhibit reduced gas port integrity due to early manufacturing tolerances. Request chamber pressure test logs (≤1×10⁻⁶ Torr leak rate) to confirm usability.
AMAT 0040-09221 Specifications and Compatible Tools
Key specs:
- Inner diameter: 457 mm
- Operating pressure: 1–200 mTorr
- Max temperature: 450°C (±5°C uniformity)
- Gas ports: 4× 1/4" NPT (argon, WF₆, silane, O₂)
- Power input: 2.3 kW (208V 3-phase)
Compatible tools:
- AMAT P5000 (models 5500-0001, 5500-0002) – produced 1998–2003
- AMAT P5000X (models 5500-0101, 5500-0102) – produced 2000–2002
Incompatibility warning: Do not install on AMAT P5000E (part #0040-12345) – revised gas port layouts cause seal failures.
What to Check Before Buying a Used AMAT 0040-09221 in 2026
- Chamber wall corrosion: Use a borescope to inspect for pitting. Reject if >2 mm thickness loss in deposition zones.
- Pressure integrity: Perform a 24-hour helium leak test. Fail if rate exceeds 5×10⁻⁵ std cm³/sec.
- Temperature sensor calibration: Compare thermocouple readings to a NIST-traceable reference. Deviation >±3°C invalidates process control.
- Gas port alignment: Measure port concentricity with a dial gauge. Tolerance must be ≤0
Recent Market Listings
Updated Aug 21$2,981
As-is$3,507
Used$3,507
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $2,981 | As-is | Aug 14, 2026 |
| Ask | $3,507 | Used | Aug 7, 2026 |
| Ask | $3,507 | Refurbished | Jul 31, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $4K – $4K
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