0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials)

Name: 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials)
Brand: Applied Materials
SKU: 0200-09531

Part No. 0200-09531

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) cost in 2026?

Pricing for used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

0200-09531 Specifications and Compatible Tools

Key specs: 200W nominal power, 13.56 MHz RF frequency, 24V DC, 1.5 SLPM gas flow. Compatible with AMAT Centura 5500 and 7500 series (2008–2015 production). Not compatible with 0200-09532 due to different coil winding geometry. Verify tool’s original ESC model (e.g., 0200-09530 vs. 0200-09531) to avoid misalignment in thermal profile.

What to Check Before Buying a Used 0200-09531 in 2026

RF-hour count: Reject units >35,000 hours without coil derating documentation.
Insulation resistance: Measure with Megger (≥100 MΩ at 500V DC; <50 MΩ = failure).
Thermal gradient: Use infrared camera to verify uniformity (<5°C variance across chuck surface).
Gas flow calibration: Test with bubble flowmeter; deviation >15% from 1.5 SLPM requires adjustment.
Lifespan metrics: Units >8 years in service often exhibit ceramic delamination; request NDT reports.

Q: Is used 0200-09531 better than new for 2026 budgets?
A: Yes, if <25,000 RF-hours and passed insulation/resistance tests. New units carry 2-year warranty but no cost advantage.

Q: Does 0200-09531 fit Centura 7500 (2012 model)?
A: Yes. Confirm tool’s ESC base part number (0200-09530 series) for compatibility.

Q: How to test gas flow accuracy?
A: Connect to bubble flowmeter at 24V; 1.5 SLPM ±10% acceptable.

Q: What’s the lead time for sourcing in 2026?
A: 2–4 weeks post-sourcing, pending RF-hour verification and shipping logistics.