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Applied Materials

0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials)

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Applied Materials

0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials)

Part No. 0200-09531

Market Price

→ Stable

$16K$54K

Typical secondary market pricing · USD

Low $16,000Avg $35,000High $54,000
Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Tested & inspected
Documentation included
Fast worldwide shipping
30-day functional warranty
Escrow payment available

Market Data

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Price history and market activity data is being compiled.

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How much does a used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) cost in 2026?

A used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) from Applied Materials typically sells for $16k – $54k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)
Save 50-70% vs. new OEM
Lead time: 2-4 weeks
Condition: B grade
30-day functional warranty
New OEM
Full OEM price (1–2.5× used)
Lead times: 12–52 weeks
New condition, full warranty
Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • Grade B — good working condition, normal wear
  • Functional test report and inspection photos
  • Available documentation (manuals, service records where available)
  • Estimated lead time: 2-4 weeks after sourcing confirmation
  • Availability: Available to Source — contact for current inventory
  • Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 0200-09531 Cost in 2026?

Used 0200-09531 heaters priced $16,000–$35,000 in 2026, depending on RF-hour count and coil integrity. Refurbished units (with new insulation and coil repair) range $36,000–$54,000. New OEM price remains ~$80,000+, offering 50–70% savings with used/refurbished options. Units with >35,000 RF-hours require derating; most buyers target 15,000–25,000 hours for optimal ROI. Note: Gas flow calibration (1.5 SLPM ±10%) and insulation resistance (≥100 MΩ) directly impact final pricing.

0200-09531 Specifications and Compatible Tools

Key specs: 200W nominal power, 13.56 MHz RF frequency, 24V DC, 1.5 SLPM gas flow. Compatible with AMAT Centura 5500 and 7500 series (2008–2015 production). Not compatible with 0200-09532 due to different coil winding geometry. Verify tool’s original ESC model (e.g., 0200-09530 vs. 0200-09531) to avoid misalignment in thermal profile.

What to Check Before Buying a Used 0200-09531 in 2026

  1. RF-hour count: Reject units >35,000 hours without coil derating documentation.
  2. Insulation resistance: Measure with Megger (≥100 MΩ at 500V DC; <50 MΩ = failure).
  3. Thermal gradient: Use infrared camera to verify uniformity (<5°C variance across chuck surface).
  4. Gas flow calibration: Test with bubble flowmeter; deviation >15% from 1.5 SLPM requires adjustment.
  5. Lifespan metrics: Units >8 years in service often exhibit ceramic delamination; request NDT reports.

Q: Is used 0200-09531 better than new for 2026 budgets?
A: Yes, if <25,000 RF-hours and passed insulation/resistance tests. New units carry 2-year warranty but no cost advantage.

Q: Does 0200-09531 fit Centura 7500 (2012 model)?
A: Yes. Confirm tool’s ESC base part number (0200-09530 series) for compatibility.

Q: How to test gas flow accuracy?
A: Connect to bubble flowmeter at 24V; 1.5 SLPM ±10% acceptable.

Q: What’s the lead time for sourcing in 2026?
A: 2–4 weeks post-sourcing, pending RF-hour verification and shipping logistics.

Recent Market Listings

Updated May 19
AskMay 12, 2026

$13,600

As-is
AskMay 5, 2026

$27,400

Used
AskApr 28, 2026

$42,600

Refurbished

Place a bid · Prices update daily

Related Parts

Quick Info

ConditionUsed
GradeB
CategoryParts & Consumables
Lead Time2-4 weeks after sourcing

Get a Quote

Market: $16K – $54K

Response within 4 hours. Export compliance handled.

Email parts@caladansemi.com

Or call us during business hours

Secondary Market

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All transactions are export compliant · Escrow available · parts@caladansemi.com