Applied Materials
0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials)
Applied Materials
0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials)
Part No. 0200-09531
Market Price
→ Stable$16K–$54K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-16
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials)
Price history and market activity data is being compiled.
How much does a used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) cost in 2026?
A used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) from Applied Materials typically sells for $16k – $54k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used 0200-09531 — Electrostatic Chuck (ESC) Heater (Applied Materials) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does 0200-09531 Cost in 2026?
Used 0200-09531 heaters priced $16,000–$35,000 in 2026, depending on RF-hour count and coil integrity. Refurbished units (with new insulation and coil repair) range $36,000–$54,000. New OEM price remains ~$80,000+, offering 50–70% savings with used/refurbished options. Units with >35,000 RF-hours require derating; most buyers target 15,000–25,000 hours for optimal ROI. Note: Gas flow calibration (1.5 SLPM ±10%) and insulation resistance (≥100 MΩ) directly impact final pricing.
0200-09531 Specifications and Compatible Tools
Key specs: 200W nominal power, 13.56 MHz RF frequency, 24V DC, 1.5 SLPM gas flow. Compatible with AMAT Centura 5500 and 7500 series (2008–2015 production). Not compatible with 0200-09532 due to different coil winding geometry. Verify tool’s original ESC model (e.g., 0200-09530 vs. 0200-09531) to avoid misalignment in thermal profile.
What to Check Before Buying a Used 0200-09531 in 2026
- RF-hour count: Reject units >35,000 hours without coil derating documentation.
- Insulation resistance: Measure with Megger (≥100 MΩ at 500V DC; <50 MΩ = failure).
- Thermal gradient: Use infrared camera to verify uniformity (<5°C variance across chuck surface).
- Gas flow calibration: Test with bubble flowmeter; deviation >15% from 1.5 SLPM requires adjustment.
- Lifespan metrics: Units >8 years in service often exhibit ceramic delamination; request NDT reports.
Q: Is used 0200-09531 better than new for 2026 budgets?
A: Yes, if <25,000 RF-hours and passed insulation/resistance tests. New units carry 2-year warranty but no cost advantage.
Q: Does 0200-09531 fit Centura 7500 (2012 model)?
A: Yes. Confirm tool’s ESC base part number (0200-09530 series) for compatibility.
Q: How to test gas flow accuracy?
A: Connect to bubble flowmeter at 24V; 1.5 SLPM ±10% acceptable.
Q: What’s the lead time for sourcing in 2026?
A: 2–4 weeks post-sourcing, pending RF-hour verification and shipping logistics.
Recent Market Listings
Updated May 19$13,600
As-is$27,400
Used$42,600
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $13,600 | As-is | May 12, 2026 |
| Ask | $27,400 | Used | May 5, 2026 |
| Ask | $42,600 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $16K – $54K
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